The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is issuing a Combined Sources Sought Notice and Notice of Intent to Sole Source for a preventive maintenance and service contract for the JEOL JBX-6300FS Electron Beam Lithographic (EBL) system. The contract is intended to be awarded solely to JEOL USA, the Original Equipment Manufacturer (OEM), due to their unique capability to provide proprietary parts, software, and specially trained technicians necessary for the maintenance of this specialized equipment. This procurement is critical for ensuring the operational integrity of the EBL system, which plays a vital role in semiconductor manufacturing and research. Interested parties are encouraged to respond by May 23, 2025, with details about their capabilities and business classification under NAICS code 333242, and can direct inquiries to Forest Crumpler at forest.crumpler@nist.gov.