Sources Sought Notice for High Vacuum motorized Stage
ID: NIST-SS26-CHIPS-20Type: Sources Sought
Overview

Buyer

COMMERCE, DEPARTMENT OFNATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYDEPT OF COMMERCE NISTGAITHERSBURG, MD, 20899, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Original Source

https://sam.gov/workspace/contract/opp/6b931e8677a148e5a72cfb9e65366083/view
Timeline
    Description

    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), has issued a Sources Sought Notice to identify potential sources for high-vacuum motorized stages. These stages are essential for a new experimental apparatus that will utilize extreme-ultraviolet (EUV) light for non-destructive measurement of computer chip features, requiring nine axes of computerized control within a high-vacuum chamber. Key technical specifications include compatibility with high vacuum conditions, specific electronic components, and detailed performance requirements for both calibration and measurement stages. Interested vendors should submit their company information, product details, and technical specifications to Elizabeth Timberlake at elizabeth.timberlake@nist.gov or Tracy Retterer at Tracy.retterer@nist.gov, as this notice is for market research purposes only and does not guarantee a contract award.

    Point(s) of Contact
    Elizabeth Timberlake
    elizabeth.timberlake@nist.gov
    Tracy Retterer
    Tracy.retterer@nist.gov
    Files
    Title
    Posted
    09-ACQ0042073_9axes-Sources Sought Notice.docx
    NIST has issued a Sources Sought Notice (NIST-SS26-CHIPS-20) to identify commercial sources for high-vacuum motorized stages. These stages are crucial for a new experimental apparatus that will use extreme-ultraviolet (EUV) light for non-destructive measurement of computer chip features. The apparatus requires nine axes of computerized control within a high-vacuum chamber, divided into a "Calibration Set" of three rotary stages and a "Measurement Set" of up to six stages for precise sample positioning. Key technical requirements include compatibility with high vacuum (below 10^-6 Torr), specific electronics (vacuum-compatible cabling, power supplies, controllers, and LabView software), and encoders. Detailed specifications are provided for both the Calibration Set (e.g., 360° rotation, ±5 mrad resolution) and the Measurement Set (e.g., six axes of motion, specific ranges, speeds, and resolutions for roll, pitch, X, Y, Z, and yaw). Vendors must also provide computer-aided drawings, controllers, and vacuum feedthroughs. Responses should include company information, product details, technical specifications, customization options, manufacturing location, NAICS code status, available services, standard terms, pricing, and federal contract information. This notice is for market research only and does not guarantee a solicitation or contract award.
    Lifecycle
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    Sources Sought Notice for High Vacuum motorized Stage
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