The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is conducting market research through a Sources Sought Notice to identify potential sources for a high-throughput high-resolution X-ray laminography/tomography system aimed at advancing semiconductor device manufacturing. The system is required to provide non-destructive three-dimensional imaging with specific performance criteria, including a resolution of 1 µm and a scan speed of at least 0.5 mm³/min, to support critical metrology gaps in the semiconductor ecosystem. This procurement is vital for enhancing metrology capabilities within the CHIPS Metrology program, which collaborates with various stakeholders in the semiconductor industry. Interested vendors should respond with detailed information about their capabilities and products by contacting Tracy Retterer or Donald Collie via email, as there is no solicitation available at this time, and responses are due as soon as possible.

**BACKGROUND**

The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs.

The National Institute of Standards and Technology (NIST) CHIPS Metrology program develops and advances cutting edge metrology capabilities for members of the US semiconductor manufacturing ecosystem.  This NIST conducted research program works with device manufacturers, tool vendors, materials suppliers, and other organizations to address critical metrology gaps to spur innovation within seven grand challenge areas.  For more information on CHIPS Metrology, please visit https://www.nist.gov/chips/research-development-programs/metrology-program

CHIPS Metrology researchers at NIST Gaithersburg require high-throughput high-resolution non-destructive three-dimensional (3D) X-ray imaging to support research within grand challenges for Advanced Metrology for Future Microelectronics Manufacturing, Enabling Metrology for Integrating Components in Advanced Packaging, and Standardizing New Materials, Processes, and Equipment for Microelectronics.

NIST anticipates procuring an X-ray laminography/tomography system and is seeking information from manufacturers capable of meeting the following needs:

1. System Resolution and Scan Speed: The system must be able to resolve 1 µm Metal/Non-metal line and space pattern while operating with a scan speed of at least 0.5 mm3/min.  Exceeding the resolution and scan speeds increases the value to the government and additional consideration will be given to systems that can exceed one or both parameters.  The government anticipates this specification to be met in laminography mode.
   1. Spatial resolution is defined as the minimum line pair thickness that can be resolved. For example, a 1 µm line pair is composed of a 500 nm-thick line of dark intensity and 500 nm-thick line of bright intensity in reconstructed three-dimensional (3D) images. Spatial resolution is not equivalent to voxel size.  For this requirement, spatial resolution is assessed by the modulation of intensity along a line that is perpendicular to the metal/non-metal line and space pattern.  The modulation of intensity between the metal voxels and non-metal voxels must exceed 10%.
   2. Scan speed is defined as the cylindrical reconstructed volume in mm3 divided by total acquisition time not including time for reconstruction.
2. Scan mode
   1. The system must be able to operate in XCL mode.  Being able to operate in both XCL and XCT modes provides additional value to the government and additional consideration will be given to a system that can operate in both modes**.** Systems that provide XCT using source/detector motions or sample pre-tilt holder will be considered.
      1. An X-ray computed laminography (XCL) system is defined as a system that measures projection images at an oblique angle to the axis of rotation and is capable of reconstructing projection data to 3D images. The tilt angle is the angle between the central X-ray beam and the axis of rotation.
      2. An X-ray computed tomography (XCT) system is defined as a system that measures projection images at 90 degrees to the axis of rotation and is capable of reconstruction projection data to 3D images.
   2. The government expects that when operating in XCT mode, the system will provide equal or higher spatial resolution at slower scan speed compared to XCL mode.  Additional consideration will be given for higher spatial resolution and faster scan speeds in XCT mode.
3. X-ray source
   1. X-ray source must have spot size small enough for sub-micrometer spatial resolution scans.
   2. X-ray source must have voltage range between 30kV and 160kV at minimum and maintain spot sizes for sub-micrometer resolution scans at any voltage within this range.
4. X-ray detector
   1. X-ray detector must have at least 13 megapixels.
5. Samples Handling and Automation
   1. The system must provide automatic (e.g. robot loading) for samples up to 100 mm × 100 mm × 20 mm.  The sample cassette must hold at least 5 samples and the system must automatically load the sample from the cassette, perform the measurement, and unload the sample back to the cassette without user intervention.  The sample handling robot is only required to load samples for XCL measurements.
   2. The system must be capable of measuring any region of 300 mm diameter sample; however, the sample handling automation requirements do not apply to 300 mm diameter samples (e.g. the user loading each sample by hand is acceptable).  The government expects that 300 mm wafers will be measured in XCL mode.  The measurable region of a 300 mm diameter sample may be as small as 100 mm × 100 mm as long as the measurable region can be aligned anywhere on the 300 mm sample (e.g. by having the user offset the sample on the sample holder prior to loading).
6. Instrument Control Capabilities
   1. The software must provide the capability to save a set of parameters known as a “recipe” that enable a user to load, perform, and save measurements for repeated studies.
   2. The control software must offer built-in tiling capabilities to collect a series of adjoining volumes that can be stitched together into a single volume during reconstruction.
   3. The instrument must allow user control of custom stage motions and image acquisitions.  Graphical User Interface (GUI), Scripting, or Application Program Interface (API) implementations that meet this requirement are acceptable.
   4. The instrument control PC and software must be controllable through Windows Remote Desktop to allow remote control of the instrument.
   5. The system must include any scripting or application programming interface (API) options that are available from the manufacturer, including any documentation of these features.
7. Reconstruction Computers and Software
   1. The computers systems included must allow for simultaneous data collections and reconstruction of previous scans.  The government anticipates this requirement being met with an instrument control PC, and a separate reconstruction PC.
   2. The system must include two identical PCs for reconstruction and data analysis.  These PCs must be capable of generating 3D stitched volumes from at least 7 fields of view. The reconstruction PCs must be capable of visualizing 3D stitched volumes up to 1TB of size. A monitor, a keyboard, and a mouse must be provided with these workstations.
   3. The provided reconstruction software must provide the following options:
      1. Radiograph (projections) pre-processing functions (e.g., flat field correction/gain correction)
      2. Phase retrieval algorithm
      3. Filtered backprojection algorithm (e.g., Feldkamp Davis Kress)
      4. Iterative reconstruction algorithm
      5. Ring artifact correction
      6. Beam hardening correction
      7. Capable of importing data from simulation software or from other XCT systems in standard image format (e.g., .tiff) for reconstruction
   4. The provided analysis software must provide the following options:
      1. Deep learning-based segmentation (e.g., u-net)
      2. Manual labeling capability for segmentation and training data preparation
      3. 3D visualization
   5. The reconstruction PC and all of the software licenses used to meet these requirements must be accessible through Windows Remote Desktop to enable remote analysis of datasets.
8. Resolution Target Sample: The vendor must supply one unit of either JIMA RT RC-02 Micro Resolution Chart for X-ray or equivalent.  The resolution target must include features at the instrument specified resolution.
9. A standard prefilter kit shall be provided for manual insertion or pre-installed on automated filter changer.
10. Facility Requirements
    1. Vendors must include a site requirements documents in their solicitation response.
    2. Footprint of the system must not exceed 1.5 m × 2.5 m.
    3. Electrical: NIST’s labs have several power options available—please contact NIST to inquire if none of the following options are acceptable: 208 VAC 3 phase power, 208 VAC single phase, 120 VAC single phase.
    4. High-pressure air: Vendor must supply a compressor to provide high-pressure air to their system if the system requires high pressure air.
11. Safety: The instrument must include appropriate shielding and interlocks protect users from unintentional exposure to ionizing radiation.
12. Installation of the analytical instrument system in building 216 on NIST’s Gaithersburg campus.

NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above.

**HOW TO RESPOND TO THIS NOTICE**

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response:  Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response.

* Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI).
* Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice.  For each product recommended to meet the Government’s requirement, provide the following:
  + Manufacturer name
  + Model number
  + Technical specifications
  + If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s)
* Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements.  Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response.
  + Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.
* Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why.  Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive.
* State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.
* Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline.
* For the NAICS code listed in this notice:
* + Indicate whether your company is (a) a small business or (b) other than small business.  See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.
* + If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.
* Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance.
* Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order; FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services.  Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.
* State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services.  Indicate if your company performs the facility renovation services or typically subcontracts the work to another company.  Indicate if your company would be interested in inspecting the intended installation site during the market research phase.
* State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services.
* If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information.
* Identify any customers in the public or private sectors to which you provided the recommended or similar equipment.  Include customer(s) information: company name, phone number, point of contact, email address.
* Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.
* State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

**QUESTIONS REGARDING THIS NOTICE**

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 calendar days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.

**IMPORTANT NOTES**

This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time.

This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.

Responses will not be considered as proposals or quotations.

No award will be made as a result of this notice.

NIST is not responsible for any costs incurred by the respondents to this notice.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate.

Thank you for taking the time to submit a response to this request!

Sources Sought Notice for CHIPS High-Throughput High-Resolution X-ray Laminography/Tomography System for Advanced Packaged Semiconductor Devices and Substrates

Sources Sought Notice for CHIPS High-Throughput High-Resolution X-ray Laminography/Tomography System for Advanced Packaged Semiconductor Devices and Substrates

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