Sources Sought Notice for High Vacuum motorized Stage
ID: NIST-SS26-CHIPS-20Type: Sources Sought
Overview

Buyer

COMMERCE, DEPARTMENT OFNATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYDEPT OF COMMERCE NISTGAITHERSBURG, MD, 20899, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Original Source

https://sam.gov/workspace/contract/opp/6b931e8677a148e5a72cfb9e65366083/view
Timeline
    Description

    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), has issued a Sources Sought Notice to identify potential sources for high-vacuum motorized stages. These stages are essential for a new experimental apparatus that will utilize extreme-ultraviolet (EUV) light for non-destructive measurement of computer chip features, requiring nine axes of computerized control within a high-vacuum chamber. Key technical specifications include compatibility with high vacuum conditions, specific electronic components, and detailed performance requirements for both calibration and measurement stages. Interested vendors should submit their company information, product details, and technical specifications to Elizabeth Timberlake at elizabeth.timberlake@nist.gov or Tracy Retterer at Tracy.retterer@nist.gov, as this notice is for market research purposes only and does not guarantee a contract award.

    Point(s) of Contact
    Elizabeth Timberlake
    elizabeth.timberlake@nist.gov
    Tracy Retterer
    Tracy.retterer@nist.gov
    Files
    Title
    Posted
    09-ACQ0042073_9axes-Sources Sought Notice.docx
    NIST has issued a Sources Sought Notice (NIST-SS26-CHIPS-20) to identify commercial sources for high-vacuum motorized stages. These stages are crucial for a new experimental apparatus that will use extreme-ultraviolet (EUV) light for non-destructive measurement of computer chip features. The apparatus requires nine axes of computerized control within a high-vacuum chamber, divided into a "Calibration Set" of three rotary stages and a "Measurement Set" of up to six stages for precise sample positioning. Key technical requirements include compatibility with high vacuum (below 10^-6 Torr), specific electronics (vacuum-compatible cabling, power supplies, controllers, and LabView software), and encoders. Detailed specifications are provided for both the Calibration Set (e.g., 360° rotation, ±5 mrad resolution) and the Measurement Set (e.g., six axes of motion, specific ranges, speeds, and resolutions for roll, pitch, X, Y, Z, and yaw). Vendors must also provide computer-aided drawings, controllers, and vacuum feedthroughs. Responses should include company information, product details, technical specifications, customization options, manufacturing location, NAICS code status, available services, standard terms, pricing, and federal contract information. This notice is for market research only and does not guarantee a solicitation or contract award.
    Lifecycle
    Title
    Type
    Sources Sought Notice for High Vacuum motorized Stage
    Currently viewing
    Sources Sought
    Similar Opportunities
    Amended Sources Sought Notice for a Ultra-High Vacuum Sample Backout Chamber
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is seeking information from potential providers for an ultra-high vacuum (UHV) sample backout chamber, which is essential for the CHIPS R&D project aimed at testing materials for UHV compatibility in the U.S. semiconductor industry. This Sources Sought Notice is part of market research to inform future procurement strategies and does not constitute a solicitation; NIST is looking for company summaries that include size status under NAICS code 334516 and confirmation of active registration on sam.gov. Responses to this notice, which has been extended to December 12, 2025, should be submitted via email and must not exceed ten pages, with no guarantee of contract award or responses to inquiries regarding market research results. Interested parties can contact Elizabeth Timberlake at elizabeth.timberlake@nist.gov for further information.
    Environmental test chamber
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is seeking information from qualified vendors regarding the procurement of an Environmental Test Chamber and a Water Recirculation System as part of a Sources Sought Notice (NIST-SS26-CHIPS-29). The Environmental Test Chamber must meet specific requirements, including a workspace of over 1.5 cubic feet, a temperature range of -35°C to +175°C, and humidity control between 10%-95% RH, among other technical specifications, to support metrology research for semiconductor device manufacturing. This procurement is crucial for evaluating materials used in semiconductor devices, thereby enhancing device reliability and performance. Interested parties should submit their responses, including company information and product specifications, to Junee Johnson at junee.johnson@nist.gov, as this notice is for market research purposes and no solicitation is currently available.
    Sources Sought Notice for two (2) CMOS Cameras
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is seeking potential sources for two scientific CMOS cameras through a sources sought notice (NIST-SS26-CHIPS-24). These cameras are integral to the Digital Twins for Atomic Layer Deposition Processes Project, aimed at developing and validating digital twin models for atomic layer deposition processes by enabling high-sensitivity and high-speed absorption tomographic measurements. Key technical specifications include a back-illuminated scientific CMOS sensor, high quantum efficiency, global shutter capability, and a minimum frame readout rate of 100 frames per second. Interested vendors should submit their responses, including company information and product details, by December 15, 2025, to Elizabeth Timberlake at elizabeth.timberlake@nist.gov or Donald Collie at donald.collie@nist.gov, with submissions not exceeding 20 pages.
    Sources Sought Notice for a MIR Camera
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), has issued a Sources Sought Notice (NIST-SS26-CHIPS-23) to identify potential sources for a mid-infrared camera and associated lenses. This equipment is critical for the Digital Twins for Atomic Layer Deposition Processes Project, which aims to develop and validate digital twin models for atomic layer deposition processes, requiring high sensitivity and rapid imaging capabilities across the mid-infrared spectral region. Interested vendors are requested to provide detailed company information, product specifications, customization capabilities, and pricing by December 15, 2025, to assist in market research for this procurement. For further inquiries, respondents may contact Elizabeth Timberlake at elizabeth.timberlake@nist.gov or Donald Collie at donald.collie@nist.gov.
    Sources Sought Notice for Continuous Wave Parametric Oscillator (CW OPO) Laser System
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is seeking information regarding a Continuous Wave Parametric Oscillator (CW OPO) Laser System to fulfill specific technical requirements. The desired system must include a pump laser, signal and idler laser outputs with defined tunable ranges and power, control electronics compatible with U.S. power and Windows PCs, as well as a high-accuracy wavelength meter and stabilization controls. This procurement is crucial for advancing analytical laboratory capabilities, and interested vendors are encouraged to submit their company details, equipment specifications, and service offerings by email to Forest Crumpler at forest.crumpler@nist.gov by October 31, 2022. This notice serves as market research and does not constitute a solicitation or commitment to award a contract.
    Sources Sought Notice for Coupled Device Detector Camera System
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is seeking information from qualified vendors regarding a Coupled Device Detector Camera System through a sources sought notice (NIST-SS26-CHIPS-25). This procurement aims to support the CHIPS RF Waveform and Rapid Frequency Comb Diagnostics for Plasma Etching Project, which focuses on enhancing plasma etching efficiencies via in situ optical diagnostics. The required system includes an intensified electron multiplication charge coupled device (IEMCCD) camera with specific technical specifications, including ultra-low noise, high gain, and fast optical emission spectroscopy capabilities. Interested parties should provide detailed company information, product specifications, and performance capabilities, and may contact Elizabeth Timberlake at elizabeth.timberlake@nist.gov or Donald Collie at donald.collie@nist.gov for further inquiries.
    Sources Sought Notice for Mid-IR Optical Frequency Comb
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), has issued a Sources Sought Notice for Mid-IR Optical Frequency Comb Systems to support its CHIPS Metrology Program's Grand Challenge 1. NIST requires three systems for applications in broadband spectroscopy, spectral reference databases, and new laser diagnostics in semiconductor processes, along with an additional system to fill a critical gap in long-wave infrared spectroradiometry and molecular spectroscopy for the space, defense, and satellite industries. Interested vendors are invited to provide information regarding their capabilities, including product specifications, customization options, and available services, while ensuring that proprietary information is not disclosed. Responses should be submitted via email to Forest Crumpler at forest.crumpler@nist.gov, as NIST seeks to gather market insights to inform future procurement decisions.
    System upgrades for Magneto-Raman and photoluminescence spectroscopy
    Buyer not available
    The National Institute of Standards and Technology (NIST) is seeking sources for system upgrades to its magneto-Raman and photoluminescence spectroscopy instrument, which is essential for evaluating 2D and wide band gap materials in the semiconductor industry. The procurement includes a new magnet power supply, a service contract, and compatible components such as low-temperature compatible, long working distance apochromatic objectives, titanium sample holders, and titanium screws for mounting electrical devices. These upgrades are critical for analyzing optical spectroscopy responses under magnetic fields at cryogenic temperatures. Interested vendors should contact Junee Johnson at junee.johnson@nist.gov for further details, as this notice serves market research purposes and does not guarantee a contract award.
    Combined Sources Sought Notice and Notice of Intent to Sole Source for Sparce Scanning Device
    Buyer not available
    The Department of Commerce's National Institute of Standards and Technology (NIST) is conducting a sources sought notice to identify potential sources for a compressed sensing scan generator, which is critical for advancing imaging and measurement solutions in integrated circuit (IC) overlay metrology. The procurement aims to enhance the speed and accuracy of image acquisition for semiconductor manufacturing processes, utilizing artificial intelligence and advanced image processing techniques. This initiative is part of the CHIPS R&D Program, which focuses on improving measurement capabilities essential for IC production. Interested vendors are encouraged to respond with their capabilities and relevant product information to the primary contact, Nina Lin, at nina.lin@nist.gov, by the specified deadline, as the government intends to issue a sole source award to Panoscientific, LLC if no other capable sources are identified.
    ScanWave Pro-Electronic Probe Interface Module (ePIM)
    Buyer not available
    The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is seeking information from potential sources for a fully electronically tunable Probe Interface Module (ePIM) to replace an existing manually tunable module used with their Oxford/Asylum Research AFM MFP-3D system. This procurement is essential for advancing NIST's measurement science research, particularly in addressing gaps within the semiconductor supply chain and R&D ecosystem. The required ePIM must feature electronic tunability, compatibility with the existing AFM and its software, and include corresponding software solutions. Interested parties are encouraged to contact Junee Johnson at junee.johnson@nist.gov for further details, as this notice is for market research purposes only and does not guarantee a solicitation or contract award.