Camera for Vacuum- and Extreme-Ultraviolet light
ID: NIST-FY25-CHIPS-0081Type: Sources Sought
Overview

Buyer

COMMERCE, DEPARTMENT OFNATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYDEPT OF COMMERCE NISTGAITHERSBURG, MD, 20899, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)
Timeline
    Description

    The Department of Commerce, through the National Institute of Standards and Technology (NIST), is seeking information from vendors regarding the procurement of a specialized camera designed for vacuum- and extreme-ultraviolet (EUV) light applications. This camera is essential for advancing metrology techniques that enhance semiconductor manufacturing, requiring capabilities such as operation in ultra-high vacuum environments and sensitivity to wavelengths ranging from 10 nm to 150 nm for non-destructive measurement of nanoscale features. Interested vendors are invited to submit their company details, product specifications, performance capabilities, and any customization options, as this Sources Sought Notice (NIST-FY25-CHIPS-0081) is part of NIST's market research and does not imply a solicitation or contract commitment. For further inquiries, vendors may contact Elizabeth Timberlake at elizabeth.timberlake@nist.gov or Tracy Retterer at Tracy.retterer@nist.gov.

    Point(s) of Contact
    Files
    Title
    Posted
    The National Institute of Standards and Technology (NIST) issued a Sources Sought Notice (NIST-FY25-CHIPS-0081) to gather market research on procuring a camera designed for vacuum- and extreme-ultraviolet (EUV) light. This camera is crucial for advancing metrology techniques aimed at enhancing semiconductor manufacturing. The device must be capable of operating in an ultra-high vacuum environment, sensitive to the 10 nm to 150 nm wavelength range, and capable of measuring nanoscale features non-destructively. Key requirements include a four-megapixel charge-coupled device (CCD), compatibility with vacuum systems, appropriate cabling and feedthroughs, along with a software development kit and a generic GUI for operation. NIST invites vendors to respond with company details, product specifications, performance capabilities, and customization options. The submission must comply with several technical criteria and articulate any limitations associated with meeting the specifications. This notice is part of NIST's market research and does not imply a solicitation or contract commitment. Responses will inform future procurement and may result in a formal solicitation published on government platforms.
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