Camera for Vacuum- and Extreme-Ultraviolet light
ID: NIST-FY25-CHIPS-0081Type: Sources Sought
Overview

Buyer

COMMERCE, DEPARTMENT OFNATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYDEPT OF COMMERCE NISTGAITHERSBURG, MD, 20899, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Original Source

https://sam.gov/opp/60131bd5850f4977a47045019387a5d3/view
Timeline
  1. 1
    Posted Apr 9, 2025, 12:00 AM UTC
  2. 2
    Updated Apr 9, 2025, 12:00 AM UTC
  3. 3
    Due Apr 23, 2025, 4:00 PM UTC
Description

The Department of Commerce, through the National Institute of Standards and Technology (NIST), is seeking information from vendors regarding the procurement of a specialized camera designed for vacuum- and extreme-ultraviolet (EUV) light applications. This camera is essential for advancing metrology techniques that enhance semiconductor manufacturing, requiring capabilities such as operation in ultra-high vacuum environments and sensitivity to wavelengths ranging from 10 nm to 150 nm for non-destructive measurement of nanoscale features. Interested vendors are invited to submit their company details, product specifications, performance capabilities, and any customization options, as this Sources Sought Notice (NIST-FY25-CHIPS-0081) is part of NIST's market research and does not imply a solicitation or contract commitment. For further inquiries, vendors may contact Elizabeth Timberlake at elizabeth.timberlake@nist.gov or Tracy Retterer at Tracy.retterer@nist.gov.

Point(s) of Contact
Elizabeth Timberlake
elizabeth.timberlake@nist.gov
Tracy Retterer
Tracy.retterer@nist.gov
Files
Title
Posted
NIST FY25 CHIPS 0081 SSN.docx
Apr 9, 2025, 9:08 PM UTC
The National Institute of Standards and Technology (NIST) issued a Sources Sought Notice (NIST-FY25-CHIPS-0081) to gather market research on procuring a camera designed for vacuum- and extreme-ultraviolet (EUV) light. This camera is crucial for advancing metrology techniques aimed at enhancing semiconductor manufacturing. The device must be capable of operating in an ultra-high vacuum environment, sensitive to the 10 nm to 150 nm wavelength range, and capable of measuring nanoscale features non-destructively. Key requirements include a four-megapixel charge-coupled device (CCD), compatibility with vacuum systems, appropriate cabling and feedthroughs, along with a software development kit and a generic GUI for operation. NIST invites vendors to respond with company details, product specifications, performance capabilities, and customization options. The submission must comply with several technical criteria and articulate any limitations associated with meeting the specifications. This notice is part of NIST's market research and does not imply a solicitation or contract commitment. Responses will inform future procurement and may result in a formal solicitation published on government platforms.
Lifecycle
Title
Type
Camera for Vacuum- and Extreme-Ultraviolet light
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