Notice of Intent to Sole Source to Micronix USA for High Vacuum Positioning Stages
ID: NIST-SS26-CHIPS-44Type: Special Notice
Overview

Buyer

COMMERCE, DEPARTMENT OFNATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYDEPT OF COMMERCE NISTGAITHERSBURG, MD, 20899, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Original Source

https://sam.gov/workspace/contract/opp/55aa90a0a022440d844566f1caa9a12e/view
Timeline
    Description

    The National Institute of Standards and Technology (NIST) is issuing a Notice of Intent to Sole Source a contract to Micronix USA for the procurement of High Vacuum Compatible Sample Positioning Stages. The primary objective of this procurement is to acquire motorized stages that enable computerized control of nine axes within a vacuum chamber, which are critical for the precise measurement of microelectronic features using extreme-ultraviolet (EUV) light. This equipment is essential for advancing metrology in microelectronics manufacturing as part of the CHIPS R&D Metrology Program. Interested parties are encouraged to respond with their capabilities and relevant information to the primary contact, Elizabeth Timberlake, at elizabeth.timberlake@nist.gov, by December 15, 2025, as this notice serves for market research purposes and does not constitute a commitment to award a contract.

    Point(s) of Contact
    Elizabeth Timberlake
    elizabeth.timberlake@nist.gov
    Tracy Retterer
    Tracy.retterer@nist.gov
    Files
    No associated files provided.
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