Commercial semi-automatic probe stations
ID: NIST-SS26-CHIPS-44Type: Sources Sought
Overview

Buyer

COMMERCE, DEPARTMENT OFNATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYDEPT OF COMMERCE NISTGAITHERSBURG, MD, 20899, USA
Timeline
    Description

    The National Institute of Standards and Technology (NIST) is issuing a Notice of Intent to Sole Source a contract to Micronix USA for the procurement of High Vacuum Compatible Sample Positioning Stages. The primary objective of this procurement is to acquire motorized stages that enable computerized control of nine axes within a vacuum chamber, which are critical for the precise measurement of microelectronic features using extreme-ultraviolet (EUV) light. This equipment is essential for advancing metrology in microelectronics manufacturing as part of the CHIPS R&D Metrology Program. Interested parties are encouraged to respond with their capabilities and relevant information to the primary contact, Elizabeth Timberlake, at elizabeth.timberlake@nist.gov, by December 15, 2025, as this notice serves for market research purposes and does not constitute a commitment to award a contract.

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