Infinity RM Ion Beam Etch System
ID: 4-B175-Q-00762-00Type: Solicitation
Overview

Buyer

ENERGY, DEPARTMENT OFENERGY, DEPARTMENT OFARGONNE NATL LAB - DOE CONTRACTORLemont, IL, 60439, USA

NAICS

Semiconductor Machinery Manufacturing (333242)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Original Source

https://sam.gov/opp/f31ad36685e744f489ae3eda868392cd/view
Timeline
    Description

    The Department of Energy, through Argonne National Laboratory, is seeking proposals for the procurement of one Infinity RM Ion Beam Etch System. This advanced etching system is crucial for nanoscale device fabrication, specifically designed to selectively remove materials while preserving low atomic number polymers, thereby enabling the production of sub-100 nanometer features. Interested vendors must submit their proposals, including a completed ANL-70 Request for Quotation and ANL-70B Form, by October 31, 2024, with all clarifying questions directed to Jenna Doria-Garner at jdoria@anl.gov by September 24, 2024. The procurement process will involve testing samples from qualified offerors to confirm their capabilities, ensuring compliance with stringent technical specifications and safety regulations.

    Point(s) of Contact
    Jenna Doria-Garner
    (630) 252-6988
    jdoria@anl.gov
    Files
    Title
    Posted
    ANL-70 Request for Quotation.doc
    The document is a Request for Quotation (RFQ) from UChicago Argonne, LLC, operator of Argonne National Laboratory, dated February 22, 2013. It seeks firm fixed-price quotations for the supply of an "Infinity RM Ion Beam Etch System." Interested vendors must submit their quotations by October 1, 2024, including proposals for processing two samples. The RFQ outlines conditions for accepting or rejecting quotes, documentation requirements, terms and conditions, and a focal contact person for inquiries, Jenna Doria. Additionally, it specifies compliance with environmental, safety, and health regulations (ES&H) for any contractor work performed on-site. The RFQ also mandates that contractors handle the disposal of debris produced during their services, highlighting responsibilities associated with the project. The attached documentation includes terms and conditions, instructions for bidders, and technical specifications related to the requested materials and services, underscoring the structured nature of federal and state RFP processes and their stringent compliance requirements.
    ANL-70B Reps and Certs.pdf
    The document is a Pre-Award Information booklet for contractors responding to government contracts, necessitating the completion of various representations and certifications required for contract compliance. Key sections entail the need for contractors to disclose their unique entity IDs, confirm any planned use of radioactive materials, and report if work will take place in government-operated facilities. The booklet outlines specific certifications such as executive compensation disclosures, affirmative action compliance, and representations regarding small businesses. It emphasizes the importance of adhering to regulations regarding prohibited telecommunications equipment and required safety measures related to beryllium processing if applicable. Contractors must affirm their understanding of the Limited Rights Data and Restricted Computer Software provisions along with eligibility for patent waivers under specific legal guidelines. Key certifications regarding debarment, cost accounting standards, and compliance with various other regulatory aspects are also required. By signing, the contractor confirms the truthfulness of these provided representations, thereby ensuring transparency and accountability as part of the government procurement process.
    Appendix A-71COM-13-FEB-2023.PDF
    Instructions for Bidders.doc.doc
    This document serves as an instructional guide for bidders responding to a Request for Quotation (RFQ) from Argonne National Laboratory, operated by UChicago Argonne, LLC under a contract with the U.S. Department of Energy. It outlines the bidding requirements, detailing that all quotes must comply with specified terms and conditions, and any exceptions must be clearly noted. Offerors must register in the System for Award Management (SAM) to be eligible, and a Pre-Award Information form must accompany their submissions. Quotes are expected to be firm for at least 60 days, with an emphasis on offering the best pricing. The document also highlights the importance of delivery dates and stipulates insurance requirements for contractors working on the Argonne site. Selection of contractors will consider price, delivery, experience, and compliance with the solicitation’s terms. Argonne reserves the right to reject bids as necessary and may make awards based on initial offers without further discussions. Bids must be submitted via email by the specified due date. Overall, this RFQ demonstrates the Laboratory's approach to obtaining services while ensuring compliance with government regulations and its commitment to managing contractor risks effectively.
    On-Site Work (Moderate)-01-SEP-2023.PDF
    Technical Specification.docx.docx
    The document outlines the technical specifications for the Infinity RM Ion Beam Etch System, intended for the Center for Nanoscale Materials (CNM). This ion beam etching instrument selectively removes materials with high atomic numbers while preserving low atomic number polymers, enabling the production of sub-100 nanometer features essential for nanoscale devices. Key specifications include stainless steel construction, a base vacuum level below 2 E-7 Torr, compatibility with various wafer sizes, and optional features like secondary ion mass spectroscopy for endpoint detection. Acceptance tests will evaluate etch uniformity, wafer-to-wafer repeatability, and the removal of photoresist masks, ensuring operational efficiency and effectiveness. The purpose reflects the ongoing need for advanced fabrication methods in nanotechnology, supporting research and development projects associated with federal funding and grants. Overall, this document serves as a formal request for proposals, aiming to procure a sophisticated etching system that meets specific technical requirements for the CNM.
    Lifecycle
    Title
    Type
    Infinity RM Ion Beam Etch System
    Currently viewing
    Solicitation
    Similar Opportunities
    Field-Emission Scanning Electron Microscope (FE-SEM)
    Active
    Energy, Department Of
    The Department of Energy, through Argonne National Laboratory, is seeking proposals for the procurement of one Field-Emission Scanning Electron Microscope (FE-SEM) to enhance its Center for Nanoscale Materials. The procurement includes the supply, installation, training, and warranty for the FE-SEM system, which is critical for advancing research in nanoscale materials characterization across various energy and environmental studies. This initiative underscores the laboratory's commitment to fostering innovation and improving scientific research capabilities, with a target installation and acceptance date set for early March 2025. Interested vendors must submit their proposals by September 20, 2024, and direct any inquiries to Jenna Doria-Garner at jdoria@anl.gov or by phone at 630-252-6988.
    G4-255016 - 100T Electric CIP Press Machine - SEE DESCRIPTION
    Active
    Energy, Department Of
    The Department of Energy, through the Argonne National Laboratory, is soliciting proposals for the procurement of one 100T Electric CIP Press Machine. This request invites firms to submit their best and final pricing for the specified equipment, with consideration for alternative options. The press machine is crucial for laboratory operations, emphasizing the importance of high-quality laboratory equipment in research and development activities. Interested vendors must ensure that their submissions are complete, including signed documentation and pricing details, by the deadline of September 24, 2024, at 11:00 AM CST. For inquiries, contact Annette Wegrzyn at awegrzyn@anl.gov or by phone at 630-252-2794.
    454092 - Transient Photoelectron and Cathodoluminescence Spectrometer - Streak Camera
    Active
    Energy, Department Of
    The Department of Energy, through Brookhaven National Laboratory (BNL), is seeking proposals for the procurement of a Transient Photoelectron and Cathodoluminescence Spectrometer with a Streak Camera. This equipment is essential for advanced analytical laboratory applications and will be utilized within the United States, promoting full and open competition among vendors. The anticipated contract type is Firm Fixed Price, with the solicitation expected to be issued by October 4, 2024, and the award date projected around December 2024. Interested parties must register under NAICS code 334516 and may contact Lisa Gonzales at lgonzales@bnl.gov or 631-344-5965 for further information.
    EIC 591 MHz RF Amplifiers Systems
    Active
    Energy, Department Of
    The Department of Energy, through Brookhaven National Laboratory, is soliciting proposals for the design, manufacture, and delivery of two 591 MHz, 200 kW RF amplifier systems and two 591 MHz, 400 kW RF amplifier systems as part of the Electron-Ion Collider project. The procurement aims to enhance accelerator technology for high-energy physics research, ensuring that the systems meet stringent reliability, safety, and operational standards. Interested vendors must submit their proposals electronically by September 20, 2024, with evaluations based on technical capabilities and pricing, and the contract is expected to be awarded by October 25, 2024. For further inquiries, potential bidders can contact William Koncelik at wkoncelik@bnl.gov or Kevin Kirkendall at kkirkenda@bnl.gov.
    Micropore Optic
    Active
    Energy, Department Of
    The Department of Energy, through the SLAC National Accelerator Laboratory, is soliciting bids for the procurement of two Micropore Optics designed for X-Ray focusing. The specifications for the optics include precise dimensions and tolerances, such as a micro-pore optic with 20-micron square pore channels, an outer dimension of 30x30 mm, and specific coating requirements. These optics are critical for advanced scientific research and applications in the field of general science and technology. Interested vendors must submit their quotes by COB on September 28, 2024, to Anthony Chin at anthonyc@slac.stanford.edu, and are reminded to comply with the Buy American Act Certification and other required representations and certifications as outlined in the attached documents.
    Silicon Substrates
    Active
    Energy, Department Of
    The Department of Energy, through Brookhaven National Laboratory (BNL), is soliciting quotes for the procurement of six silicon substrates as part of a Request for Quote (RFQ) under solicitation number RFQ-452273. The procurement aims to fulfill specific technical requirements outlined in the Statement of Work (SOW), which includes detailed specifications for dimensions, surface quality, and tolerances necessary for advanced scientific applications. This initiative underscores the government's commitment to supporting research and technology through precise procurement processes, with potential future needs for additional silicon mirrors. Interested vendors must submit their proposals by October 18, 2024, at 5:00 p.m. EDT, and can direct inquiries to Ben Furlow at bfurlow@bnl.gov or by phone at 631-344-4070.
    RFQ 442220.3 EIC Arc Magnet Beam Screen Profile
    Active
    Energy, Department Of
    The Department of Energy, through Brookhaven National Laboratory (BNL), is soliciting quotes for the Arc Magnet Beam Screen Profile under RFQ 442220.3. This procurement aims to acquire specific metal screening products as detailed in the associated documentation, which is critical for ongoing research and development activities at the laboratory. The selected vendor will play a vital role in supporting BNL's scientific initiatives, contributing to advancements in energy research. Interested parties must submit their quotes by 5:00 P.M. EST on October 21, 2024, and any questions regarding the solicitation should be directed to Cindy Blanchard at cblanchar@bnl.gov by October 14, 2024.
    NVIDIA Infiniband Support
    Active
    Energy, Department Of
    The Department of Energy, through Argonne National Laboratory, is seeking firm fixed price quotations for NVIDIA Infiniband Support services. The procurement aims to secure technical support renewals for NVIDIA products, ensuring compliance with the outlined terms and conditions in the Request for Quotation (RFQ) documents. This support is critical for maintaining the operational efficiency of advanced computing systems utilized in various research and development projects at the laboratory. Interested bidders must submit their quotations electronically by 5:00 PM on the specified due date, and for inquiries, they can contact Jeremy Sladetz at jsladetz@anl.gov or by phone at 630-252-7946.
    RaySpec Ltd. Detector (No Substitutes)
    Active
    Energy, Department Of
    The Department of Energy, through Brookhaven National Laboratory, is seeking quotes for a specific detector from RaySpec Ltd., with a focus on firm fixed pricing and compliance with procurement standards. The procurement requires detailed quotations that include the country of origin, unique entity identifier, lead time, and supporting documentation such as a published price list and compliance forms. This detector is crucial for advanced detection technology in research applications, emphasizing quality and safety in alignment with U.S. Department of Energy guidelines. Interested vendors must ensure registration in the System for Award Management (SAM) and submit their quotes by the specified deadline, with all pricing valid for 60 days. For further inquiries, contact Beth Gilman at gilman@bnl.gov or call 631-344-4144.
    Libera Spark ERPT & Pilot Tone or its Equivalent
    Active
    Energy, Department Of
    The Department of Energy, through Brookhaven National Laboratory, is seeking quotes for the procurement of the Libera Spark ERPT and Libera Pilot Tone FE (500 MHz) under a Firm Fixed Price (FFP) contract. Vendors are required to provide a detailed quote that includes their Unique Entity Identifier (UEI), country of origin, and a published price list for price justification, along with compliance documentation for equivalent products if applicable. These items are critical for analytical laboratory operations, emphasizing the importance of quality assurance and adherence to federal safety regulations throughout the procurement process. Interested vendors should submit their quotes to Beth Gilman at gilman@bnl.gov by the specified deadline, ensuring they are registered in the System for Award Management (SAM) to facilitate the procurement process.