The Department of Commerce, specifically the National Institute of Standards and Technology (NIST), is seeking sources for an annual maintenance service contract for an ASML PAS 5500/275D stepper lithography system located in Gaithersburg, Maryland. The contract will cover routine preventive maintenance, emergency services, repair, and calibration, requiring factory-trained personnel with specific experience and qualifications in servicing this equipment. This service is critical for maintaining the operational efficiency of the lithography system, which is essential for nanoscale science and technology research. Interested vendors should respond to the notice by contacting Jenna Bortner or Forest Crumpler via email, providing detailed information about their capabilities and qualifications, as there is an intent to issue a Sole Source Award to ASML US LLC if no other sources are identified.