The Department of Energy, through Brookhaven National Laboratory (BNL), is seeking information from companies regarding their capabilities to provide a magnetron sputter deposition system for quantum device fabrication. This Request for Information (RFI) outlines the need for a highly flexible, ultrahigh vacuum (UHV) system that can perform both reactive and non-reactive sputtering with precise process control, including specific requirements for components such as a UHV sputtering chamber, integrated vacuum pumping system, and a substrate stage capable of high-temperature heating. The procurement is crucial for advancing quantum technology research, and interested vendors must submit their responses electronically by 5:00 PM Eastern Time on December 24, 2025, to Aaron Hagler at ahagler@bnl.gov, with the subject line “BSA RFI-471842.”

C2QA_Sputter_RFI.pdf

Brookhaven National Laboratory's Co-design Center for Quantum Advantage (C2QA) seeks a magnetron sputter deposition system for quantum device fabrication. This Request for Information (RFI) outlines specifications for a highly flexible, ultrahigh vacuum (UHV) system capable of reactive and non-reactive sputtering with precise process control. Key components include a UHV sputtering chamber with at least four magnetron sources, an integrated vacuum pumping system, a substrate stage capable of 1000 °C heating, a gas handling system with mass flow controllers, an integrated load-lock chamber, and a computer control system for automation and monitoring. The system must achieve a base vacuum of ≤ 2 × 10⁻⁹ Torr and offer expansion capabilities for additional sources and ports. The RFI also details requirements for power supplies, substrate handling, load-lock features, and computer control. Onsite installation, commissioning, training, and a 2-3 year warranty are mandatory. The document concludes with vendor questions regarding tool specifications, facility requirements, safety certifications, manufacturing origin, and warranty/servicing plans.

Hello,

This is a **REQUEST FOR INFORMATION (RFI) NOTICE** open to all companies that meet all the requirements/specifications of the attached RFI document for this requirement.  This RFI is solely for information and planning purposes for the effort described herein and is not to be construed as a commitment by the U.S. Government, nor will the U.S. Government pay for information solicited. The information from this notice will help the Department of Energy (DOE) survey available resources.

**PLEASE NOTE THAT THIS IS NOT A REQUEST FOR PROPOSAL, NO SOLICITATION EXISTS AT THIS TIME**.

Brookhaven Science Associates, LLC (herein known as “BSA”), operator of Brookhaven National Laboratory (BNL) under a Prime Contract with the U.S. Department of Energy (DOE) herewith requests your capabilities, as outlined in the attached RFI document for the subject requirement. The information being solicited includes, but is not limited to, the following:

     a)  Indication of your interest in bidding on the items and services outlined in the attached RFI document.

     b) A brief Statement of Capabilities detailing how your company meets the requirements outlined in the attached RFI document.

     c) Answers to the questions stated in the attached RFI document.

Submittals must be received by BSA no later than **5:00 PM Eastern Time, on December 24th, 2025**.  Any information received after this time and date may not be considered.

BSA prefers electronic submissions of information.  Electronic submissions will be accepted by the following method:

Email submissions must include the information noted above.  Emails shall be sent to ahagler@bnl.gov with “**BSA RFI-471842”** in the subject line.

We trust that the information contained herein is sufficient to permit your company to prepare a submittal outlining your capabilities, however, should you have any questions, please direct questions to the email address listed above.  All questions must be submitted via email.

Thank you,

Buyer

NAICS

PSC

Original Source