BSA RFI-PVD Tool
ID: 472564Type: Sources Sought
Overview

Buyer

ENERGY, DEPARTMENT OFENERGY, DEPARTMENT OFBROOKHAVEN NATL LAB -DOE CONTRACTORUpton, NY, 11973, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

OPERATION OF GOVERNMENT-OWNED CONTRACTOR-OPERATED (GOCO) R&D FACILITIES (M1HA)

Original Source

https://sam.gov/workspace/contract/opp/bbebb5c77cf6402ca7680b3b24592f60/view
Timeline
    Description

    The Department of Energy, through Brookhaven National Laboratory (BNL), is seeking information from companies regarding their capabilities to provide a magnetron sputter deposition system for quantum device fabrication. This Request for Information (RFI) outlines the need for a highly flexible, ultrahigh vacuum (UHV) system that can perform both reactive and non-reactive sputtering with precise process control, including specific requirements for components such as a UHV sputtering chamber, integrated vacuum pumping system, and a substrate stage capable of high-temperature heating. The procurement is crucial for advancing quantum technology research, and interested vendors must submit their responses electronically by 5:00 PM Eastern Time on December 24, 2025, to Aaron Hagler at ahagler@bnl.gov, with the subject line “BSA RFI-471842.”

    Point(s) of Contact
    Aaron Hagler
    ahagler@bnl.gov
    Files
    Title
    Posted
    C2QA_Sputter_RFI.pdf
    Brookhaven National Laboratory's Co-design Center for Quantum Advantage (C2QA) seeks a magnetron sputter deposition system for quantum device fabrication. This Request for Information (RFI) outlines specifications for a highly flexible, ultrahigh vacuum (UHV) system capable of reactive and non-reactive sputtering with precise process control. Key components include a UHV sputtering chamber with at least four magnetron sources, an integrated vacuum pumping system, a substrate stage capable of 1000 °C heating, a gas handling system with mass flow controllers, an integrated load-lock chamber, and a computer control system for automation and monitoring. The system must achieve a base vacuum of ≤ 2 × 10⁻⁹ Torr and offer expansion capabilities for additional sources and ports. The RFI also details requirements for power supplies, substrate handling, load-lock features, and computer control. Onsite installation, commissioning, training, and a 2-3 year warranty are mandatory. The document concludes with vendor questions regarding tool specifications, facility requirements, safety certifications, manufacturing origin, and warranty/servicing plans.
    Lifecycle
    Title
    Type
    BSA RFI-PVD Tool
    Currently viewing
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