BSA RFI-PVD Tool

Brookhaven National Laboratory's Co-design Center for Quantum Advantage (C2QA) seeks a magnetron sputter deposition system for quantum device fabrication. This Request for Information (RFI) outlines specifications for a highly flexible, ultrahigh vacuum (UHV) system capable of reactive and non-reactive sputtering with precise process control. Key components include a UHV sputtering chamber with at least four magnetron sources, an integrated vacuum pumping system, a substrate stage capable of 1000 °C heating, a gas handling system with mass flow controllers, an integrated load-lock chamber, and a computer control system for automation and monitoring. The system must achieve a base vacuum of ≤ 2 × 10⁻⁹ Torr and offer expansion capabilities for additional sources and ports. The RFI also details requirements for power supplies, substrate handling, load-lock features, and computer control. Onsite installation, commissioning, training, and a 2-3 year warranty are mandatory. The document concludes with vendor questions regarding tool specifications, facility requirements, safety certifications, manufacturing origin, and warranty/servicing plans.