Ion Beam Etch System
ID: 4-B175-Q-00762-00Type: Solicitation
Overview

Buyer

ENERGY, DEPARTMENT OFENERGY, DEPARTMENT OFARGONNE NATL LAB - DOE CONTRACTORLemont, IL, 60439, USA

NAICS

Semiconductor Machinery Manufacturing (333242)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)
Timeline
  1. 1
    Posted Sep 17, 2024, 12:00 AM UTC
  2. 2
    Updated Nov 21, 2024, 12:00 AM UTC
  3. 3
    Due Dec 3, 2024, 5:59 AM UTC
Description

The Department of Energy, through Argonne National Laboratory, is seeking to procure one Infinity RM Ion Beam Etch System to enhance its capabilities in nanoscale materials research. The procurement requires interested vendors to submit detailed proposals that include technical specifications, lead times, and the ability to process two samples, with a focus on systems compatible with 150 mm or larger wafers. This advanced etching system is crucial for selectively removing materials in the fabrication of nanoscale devices, reflecting the government's commitment to supporting cutting-edge scientific advancements. Proposals are due by December 2, 2024, with all clarifying questions to be submitted by September 24, 2024; interested parties can contact Jenna Doria-Garner at jdoria@anl.gov or by phone at 630-252-6988 for further information.

Point(s) of Contact
Files
Title
Posted
Nov 21, 2024, 5:24 PM UTC
This document is an addendum (Addendum No. 0001) to Request for Quotation (RFQ) 4-B175-Q-00762-00 issued by the Argonne National Laboratory, managed by the U.S. Department of Energy. The addendum provides clarifications related to the project's sample measurement and processing requirements. Offerors are instructed on how to handle samples, including details about the dimensions and coatings of the provided wafers, which need to be processed and returned. Key issues for the proposed solutions emphasize the removal of nonreactive materials and the expectation that no laboratory representative will need to observe the process at the offeror's facility. The document emphasizes the trust in the offeror's ability to deliver consistent results and confirms that acceptance testing will be conducted at Argonne to ensure reproducibility. The addendum is formal in tone, reflecting the professional communication expected in federal procurement processes.
Nov 21, 2024, 5:24 PM UTC
The document is an addendum (0002) related to Request for Quotation (RFQ) No. 4-B175-Q-00762-00, issued by Argonne National Laboratory. It serves to provide clarifications regarding the specifications for a chemically assisted ion beam etch (CAIBE) system. Key points include the necessity for substrate heating (200-300 ºC) to achieve optimal etching results on III-V materials, and it encourages manufacturers to detail their heating capabilities in proposals. The laboratory requires systems that can process 150 mm or larger wafers (200 mm preferred) but will not accept tools limited to 100 mm wafers. Additionally, the document specifies the gases available for the process and requests manufacturers' recommendations for optimal performance, alongside a breakdown of cost differences between processing 150 mm versus 200 mm wafers. The purpose of the addendum is to ensure clarity for offerors preparing their proposals, emphasizing the technical requirements and expectations for the requested equipment. This aligns with government RFP practices, ensuring that vendors fully understand project needs to promote effective bids.
Nov 21, 2024, 5:24 PM UTC
The document is a Request for Quotation (RFQ) from UChicago Argonne, LLC, operator of Argonne National Laboratory, dated February 22, 2013. It seeks firm fixed-price quotations for the supply of an "Infinity RM Ion Beam Etch System." Interested vendors must submit their quotations by October 1, 2024, including proposals for processing two samples. The RFQ outlines conditions for accepting or rejecting quotes, documentation requirements, terms and conditions, and a focal contact person for inquiries, Jenna Doria. Additionally, it specifies compliance with environmental, safety, and health regulations (ES&H) for any contractor work performed on-site. The RFQ also mandates that contractors handle the disposal of debris produced during their services, highlighting responsibilities associated with the project. The attached documentation includes terms and conditions, instructions for bidders, and technical specifications related to the requested materials and services, underscoring the structured nature of federal and state RFP processes and their stringent compliance requirements.
Nov 21, 2024, 5:24 PM UTC
The document is a Pre-Award Information booklet for contractors responding to government contracts, necessitating the completion of various representations and certifications required for contract compliance. Key sections entail the need for contractors to disclose their unique entity IDs, confirm any planned use of radioactive materials, and report if work will take place in government-operated facilities. The booklet outlines specific certifications such as executive compensation disclosures, affirmative action compliance, and representations regarding small businesses. It emphasizes the importance of adhering to regulations regarding prohibited telecommunications equipment and required safety measures related to beryllium processing if applicable. Contractors must affirm their understanding of the Limited Rights Data and Restricted Computer Software provisions along with eligibility for patent waivers under specific legal guidelines. Key certifications regarding debarment, cost accounting standards, and compliance with various other regulatory aspects are also required. By signing, the contractor confirms the truthfulness of these provided representations, thereby ensuring transparency and accountability as part of the government procurement process.
Nov 21, 2024, 5:24 PM UTC
Nov 21, 2024, 5:24 PM UTC
This document serves as an instructional guide for bidders responding to a Request for Quotation (RFQ) from Argonne National Laboratory, operated by UChicago Argonne, LLC under a contract with the U.S. Department of Energy. It outlines the bidding requirements, detailing that all quotes must comply with specified terms and conditions, and any exceptions must be clearly noted. Offerors must register in the System for Award Management (SAM) to be eligible, and a Pre-Award Information form must accompany their submissions. Quotes are expected to be firm for at least 60 days, with an emphasis on offering the best pricing. The document also highlights the importance of delivery dates and stipulates insurance requirements for contractors working on the Argonne site. Selection of contractors will consider price, delivery, experience, and compliance with the solicitation’s terms. Argonne reserves the right to reject bids as necessary and may make awards based on initial offers without further discussions. Bids must be submitted via email by the specified due date. Overall, this RFQ demonstrates the Laboratory's approach to obtaining services while ensuring compliance with government regulations and its commitment to managing contractor risks effectively.
Nov 21, 2024, 5:24 PM UTC
Nov 21, 2024, 5:24 PM UTC
The Statement of Work (SOW) outlines the procurement of an Ion Beam Etch System for the Center for Nanoscale Materials (CNM) at Argonne National Laboratory (ANL). This advanced instrument is designed for selectively removing materials without forming volatile species in plasma, facilitating nanoscale applications critical in modern technology. The contractor is responsible for engineering, manufacturing, and assembly, ensuring compliance with technical specifications and safety codes. The project involves extensive pre-delivery testing, disassembly for shipping, reassembly, and final commissioning at CNM, including training for staff on operation and maintenance. Key tasks for the contractor include supplying necessary materials, conducting Factory and Site Acceptance Tests, and providing a comprehensive warranty and service plan. The document stresses adherence to safety regulations for electrical work, process piping, as well as hoisting and rigging protocols. Proper documentation, including acceptance test reports and maintenance manuals, is also mandated. The overarching goal is to acquire a state-of-the-art instrument that enhances CNM's capacity for research and development in nanoscale technologies while ensuring safety and compliance with all relevant standards.
Sep 25, 2024, 3:08 PM UTC
The document outlines the specifications for an ion beam etch system, referred to as the "Instrument," intended for use at the Center for Nanoscale Materials (CNM). This system is designed to selectively remove non-volatile materials by directing a collimated beam of ions at the material's surface post-patterning. Key features include stainless steel construction, a vacuum level below 2 E-7 Torr, compatibility with 150 mm or larger wafers, a loadlock for efficient processing, and optional secondary ion mass spectrometry (SIMS) for endpoint detection. The acceptance test requirements emphasize etch uniformity, wafer-to-wafer repeatability, and effective removal of the photoresist mask, ensuring that the instrument meets performance standards. This initiative reflects federal objectives to advance nanoscale research capabilities, providing vital tools for material science and technology applications. Overall, the document serves as a technical framework for procurement related to federal grants and local RFPs aimed at enhancing research infrastructure.
Sep 17, 2024, 5:26 PM UTC
The document outlines the technical specifications for the Infinity RM Ion Beam Etch System, intended for the Center for Nanoscale Materials (CNM). This ion beam etching instrument selectively removes materials with high atomic numbers while preserving low atomic number polymers, enabling the production of sub-100 nanometer features essential for nanoscale devices. Key specifications include stainless steel construction, a base vacuum level below 2 E-7 Torr, compatibility with various wafer sizes, and optional features like secondary ion mass spectroscopy for endpoint detection. Acceptance tests will evaluate etch uniformity, wafer-to-wafer repeatability, and the removal of photoresist masks, ensuring operational efficiency and effectiveness. The purpose reflects the ongoing need for advanced fabrication methods in nanotechnology, supporting research and development projects associated with federal funding and grants. Overall, this document serves as a formal request for proposals, aiming to procure a sophisticated etching system that meets specific technical requirements for the CNM.
Nov 21, 2024, 5:24 PM UTC
The document outlines specifications for an ion beam etching system intended for use by the Center for Nanoscale Materials (CNM). The system is designed to selectively remove non-volatile materials, facilitating the fabrication of nanoscale devices and sensors with features below 100 nanometers. Key features include a stainless steel construction, a vacuum level below 2 E-7 Torr, compatibility with 150 mm or larger wafers, a loadlock for rapid processing, adjustable etching angles, and cooling mechanisms to prevent damage during etching. It is equipped with options for secondary ion mass spectrometry for endpoint detection and chemically assisted etching techniques. Acceptance testing will evaluate etch uniformity, repeatability, and substrate temperature control through removable photoresist. This RFP indicates a significant investment in advanced nanotechnology tools, aiming to enhance CNM's capabilities in nanoscale research and development while adhering to rigorous performance standards. Overall, the initiative reflects the government's commitment to supporting cutting-edge scientific work.
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