Infinity RM Ion Beam Etch System
ID: 4-B175-Q-00762-00Type: Solicitation
Overview

Buyer

ENERGY, DEPARTMENT OFENERGY, DEPARTMENT OFARGONNE NATL LAB - DOE CONTRACTORLemont, IL, 60439, USA

NAICS

Semiconductor Machinery Manufacturing (333242)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Original Source

https://sam.gov/opp/f31ad36685e744f489ae3eda868392cd/view
Timeline
    Description

    The Department of Energy, through Argonne National Laboratory, is seeking proposals for the procurement of one Infinity RM Ion Beam Etch System. This advanced etching system is crucial for nanoscale device fabrication, specifically designed to selectively remove materials while preserving low atomic number polymers, thereby enabling the production of sub-100 nanometer features. Interested vendors must submit their proposals, including a completed ANL-70 Request for Quotation and ANL-70B Form, by October 31, 2024, with all clarifying questions directed to Jenna Doria-Garner at jdoria@anl.gov by September 24, 2024. The procurement process will involve testing samples from qualified offerors to confirm their capabilities, ensuring compliance with stringent technical specifications and safety regulations.

    Point(s) of Contact
    Jenna Doria-Garner
    (630) 252-6988
    jdoria@anl.gov
    Files
    Title
    Posted
    ANL-70 Request for Quotation.doc
    The document is a Request for Quotation (RFQ) from UChicago Argonne, LLC, operator of Argonne National Laboratory, dated February 22, 2013. It seeks firm fixed-price quotations for the supply of an "Infinity RM Ion Beam Etch System." Interested vendors must submit their quotations by October 1, 2024, including proposals for processing two samples. The RFQ outlines conditions for accepting or rejecting quotes, documentation requirements, terms and conditions, and a focal contact person for inquiries, Jenna Doria. Additionally, it specifies compliance with environmental, safety, and health regulations (ES&H) for any contractor work performed on-site. The RFQ also mandates that contractors handle the disposal of debris produced during their services, highlighting responsibilities associated with the project. The attached documentation includes terms and conditions, instructions for bidders, and technical specifications related to the requested materials and services, underscoring the structured nature of federal and state RFP processes and their stringent compliance requirements.
    ANL-70B Reps and Certs.pdf
    The document is a Pre-Award Information booklet for contractors responding to government contracts, necessitating the completion of various representations and certifications required for contract compliance. Key sections entail the need for contractors to disclose their unique entity IDs, confirm any planned use of radioactive materials, and report if work will take place in government-operated facilities. The booklet outlines specific certifications such as executive compensation disclosures, affirmative action compliance, and representations regarding small businesses. It emphasizes the importance of adhering to regulations regarding prohibited telecommunications equipment and required safety measures related to beryllium processing if applicable. Contractors must affirm their understanding of the Limited Rights Data and Restricted Computer Software provisions along with eligibility for patent waivers under specific legal guidelines. Key certifications regarding debarment, cost accounting standards, and compliance with various other regulatory aspects are also required. By signing, the contractor confirms the truthfulness of these provided representations, thereby ensuring transparency and accountability as part of the government procurement process.
    Appendix A-71COM-13-FEB-2023.PDF
    Instructions for Bidders.doc.doc
    This document serves as an instructional guide for bidders responding to a Request for Quotation (RFQ) from Argonne National Laboratory, operated by UChicago Argonne, LLC under a contract with the U.S. Department of Energy. It outlines the bidding requirements, detailing that all quotes must comply with specified terms and conditions, and any exceptions must be clearly noted. Offerors must register in the System for Award Management (SAM) to be eligible, and a Pre-Award Information form must accompany their submissions. Quotes are expected to be firm for at least 60 days, with an emphasis on offering the best pricing. The document also highlights the importance of delivery dates and stipulates insurance requirements for contractors working on the Argonne site. Selection of contractors will consider price, delivery, experience, and compliance with the solicitation’s terms. Argonne reserves the right to reject bids as necessary and may make awards based on initial offers without further discussions. Bids must be submitted via email by the specified due date. Overall, this RFQ demonstrates the Laboratory's approach to obtaining services while ensuring compliance with government regulations and its commitment to managing contractor risks effectively.
    On-Site Work (Moderate)-01-SEP-2023.PDF
    Technical Specification.docx.docx
    The document outlines the technical specifications for the Infinity RM Ion Beam Etch System, intended for the Center for Nanoscale Materials (CNM). This ion beam etching instrument selectively removes materials with high atomic numbers while preserving low atomic number polymers, enabling the production of sub-100 nanometer features essential for nanoscale devices. Key specifications include stainless steel construction, a base vacuum level below 2 E-7 Torr, compatibility with various wafer sizes, and optional features like secondary ion mass spectroscopy for endpoint detection. Acceptance tests will evaluate etch uniformity, wafer-to-wafer repeatability, and the removal of photoresist masks, ensuring operational efficiency and effectiveness. The purpose reflects the ongoing need for advanced fabrication methods in nanotechnology, supporting research and development projects associated with federal funding and grants. Overall, this document serves as a formal request for proposals, aiming to procure a sophisticated etching system that meets specific technical requirements for the CNM.
    Lifecycle
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    Infinity RM Ion Beam Etch System
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