Electron Beam Evaporator System
ID: N00173-25-Q-JD07Type: Combined Synopsis/Solicitation
Overview

Buyer

DEPT OF DEFENSEDEPT OF THE NAVYNAVAL RESEARCH LABORATORYWASHINGTON, DC, 20375-5328, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Set Aside

No Set aside used (NONE)

Original Source

https://sam.gov/opp/02c333a6b6fe4f658c338e170f0c1fc1/view
Timeline
    Description

    The Department of Defense, through the Naval Research Laboratory (NRL), is seeking proposals for an Electron Beam Evaporator System designed for the deposition of metallic thin films on semiconductor devices. The system must accommodate wafer sizes up to 150 mm in diameter and include features such as a fully automated operation, a high-capacity cryogenic pumping system, and advanced control software, ensuring compatibility with various metals and laboratory dimensions. This procurement is critical for advancing research and development in semiconductor technology, and interested vendors are required to submit electronic quotes along with compliance documents and warranties by the specified deadline. For further inquiries, potential bidders can contact Jamie L. Dixon at jamie.l.dixon8.civ@us.navy.mil or by phone at (202) 923-1466.

    Point(s) of Contact
    Jamie L. Dixon
    (202) 923-1466
    jamie.l.dixon8.civ@us.navy.mil
    Files
    Title
    Posted
    CSS N00173-25-Q-JD07.pdf
    The document outlines Solicitation No. N00173-25-Q-JD07, a request for quotation (RFQ) by the Naval Research Laboratory (NRL) for an Electron Beam Evaporator to automate the deposition of metallic thin films on semiconductor device wafers. The RFQ details specifications for the evaporator, requiring compatibility with various wafer sizes, automated operation, and high-quality vacuum systems. The solicitation emphasizes the necessity for thorough documentation, including user manuals, and mandates on-site installation and training for NRL personnel. Potential vendors are instructed to submit electronic quotes, compliance documents, and warranties. Evaluation criteria prioritize technical capability, considering how well offers align with specified requirements, followed by past performance risk and price reasonableness. The NRL intends to select a vendor based on the best overall value offered, rather than solely the lowest price. The document emphasizes the procurement of new equipment, excluding remanufactured items, and requires adherence to various federal acquisition regulations and protective measures against telecommunications security risks.
    NRL_Specifications_for_Electron_Beam_Evaporator.pdf
    The Naval Research Laboratory (NRL) requires a commercial electron beam evaporator for depositing metallic thin films on semiconductor wafers. The evaporator must handle wafers up to 150 mm in diameter and small parts down to 5 mm, with compatibility for various metals. Essential features include a fully automated process, a 304L stainless steel chamber, a high-capacity cryogenic pumping system, and advanced control software for recipe-driven evaporation. The system should also include a load lock for wafer transfer, an 8-pocket electron beam source, and a cooling platen. Additional requirements specify compatibility with laboratory dimensions, inclusion of user manuals, and comprehensive maintenance support, such as spare parts. The contractor is responsible for installation, training, and providing a minimum 36-month warranty. This request for proposals aligns with government procurement practices aimed at acquiring specialized technological equipment for research and development purposes.
    Lifecycle
    Title
    Type
    Electron Beam Evaporator System
    Currently viewing
    Combined Synopsis/Solicitation
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