Plasma Enhanced Chemical Vapor Deposition (PECVD) System
ID: 5-B176-Q-00304-00Type: Solicitation
Overview

Buyer

ENERGY, DEPARTMENT OFENERGY, DEPARTMENT OFARGONNE NATL LAB - DOE CONTRACTORLemont, IL, 60439, USA

NAICS

Other Professional Equipment and Supplies Merchant Wholesalers (423490)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)
Timeline
    Description

    The Department of Energy, through Argonne National Laboratory, is seeking qualified suppliers to provide a Plasma Enhanced Chemical Vapor Deposition (PECVD) System. The procurement aims to acquire a system that meets specific technical requirements, including a pressurized reactor design and dual frequency power generators, to facilitate rapid and uniform film deposition for materials such as SiO2 and SiN. This equipment is crucial for advancing research capabilities in nanoscale materials, supporting various scientific projects at the laboratory. Interested vendors must submit their quotations by February 28, 2025, and can direct inquiries to Molly Murtaugh at mmurtaugh@anl.gov or by phone at 630-252-3094.

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    The document is an addendum to Request for Quotation (RFQ) No. 5-B176-Q-00304-00 issued by the U.S. Department of Energy's Argonne National Laboratory. It outlines essential specifications and clarifications regarding a PECVD (Plasma-Enhanced Chemical Vapor Deposition) system required for a project. Key points include the necessity for a pressurized reactor design and hot wall configuration, which are mandatory to prevent contamination and ensure efficient operation. The addendum also specifies the acceptable materials for film deposition, including SiO2 and SiC, and clarifies that the uniformity of wafers must meet specific criteria. Additionally, the document addresses the definitions of a "maintenance-free" pressure control system and reactor, emphasizing the absence of components prone to clogging. It underscores the importance of dual frequency for depositions and outlines deposition temperature requirements ranging from 150 to 320 degrees Celsius. The addendum serves as a critical resource for bidders to align their proposals with the lab's technical expectations while ensuring compliance with the RFQ parameters.
    The document is a Request for Quotation (RFQ) from UChicago Argonne, LLC, operator of Argonne National Laboratory, inviting prospective suppliers to provide fast quotes for various materials and services related to a Plasma Enhanced Chemical Vapor Deposition (PECVD) System. The RFQ specifies a deadline of February 28, 2025, for submissions and emphasizes that it follows a lowest price, technically acceptable methodology. It outlines requirements, such as offering firm prices, responding with published price lists or customer invoices, and adhering to specified shipping and payment terms. The document lists items needed, including multiple substrate holders and an optical emission interferometry endpoint, along with various instructions for quotations. Additionally, it references several applicable documents and terms that bidders must comply with, indicating the scope for potential exceptions. The RFQ's core purpose is to procure specific technical equipment efficiently while ensuring compliance with federal guidelines and facilitating a fair bidding process.
    The document ANL-70A (Short Version) from Argonne National Laboratory outlines representations and certifications required for organizations submitting offers in response to government RFPs and grants. It serves as a supplemental guide to the U.S. Federal Government’s System for Award Management (SAM), ensuring compliance with federal regulations, particularly the Federal Acquisition Regulation (FAR). Key sections include general information about the offering entity, confirmation of SAM registration accuracy, and various certifications related to telecommunications equipment, conflict of interest disclosures, and the Buy American Act. The form requires details on the company’s type, NAICS code, and potential conflicts involving Argonne employees or their relatives. Offerors must represent the origin of supplied products and certify their independence in price determination. Additional certifications are required for larger contracts, detailing cost accounting practices and any necessary disclosures. The signature section mandates that individuals authorized to sign confirm the accuracy of their representations under penalty of perjury. This document underscores Argonne’s commitment to ethical conduct in procurement and transparency in interactions with federal entities, ultimately aiming to ensure fair competition and regulatory compliance throughout the contracting process.
    The document outlines the terms and conditions for commercial goods and services at Argonne National Laboratory (ANL), emphasizing compliance with the Federal Acquisition Regulations (FAR) and Department of Energy Acquisition Regulations (DEAR). It defines key parties, such as Argonne and the Government, and highlights important thresholds for procurement, including a Micro-Purchase Threshold of $10,000 and a Simplified Acquisition Threshold of $250,000. Key clauses address acceptance and inspection of goods, contractor obligations regarding employee conduct, adherence to environmental protection laws, and responsibilities concerning the handling of materials with ozone-depleting substances. It includes specific requirements for reporting on hydrofluorocarbon usage, export licenses, incident management, and stipulates warranties for both services and supplies. The document meticulously outlines conditions under which the contract may be terminated, either for cause or for the convenience of the Laboratory. It mandates adherence to laws and regulations and emphasizes the importance of maintaining the integrity of supplied goods, ensuring they are genuine and appropriately documented. Overall, the terms reflect ANL's commitment to regulatory compliance and operational integrity in its contracting practices, crucial within the context of federal contracting processes.
    The document outlines the intellectual property provisions related to data management and rights in contracts, specifically according to various federal regulations (FAR and DEAR). It defines key terms such as data, limited rights data, restricted computer software, and technical data, elucidating the rights of both the government and contractors regarding these data types. The government is granted unlimited rights to data produced under the contract, while contractors retain specific rights to use and assert copyright on their produced data, subject to prior approval in some cases. It discusses the process for handling restricted data and the obligations of contractors in terms of data delivery and identification of any withheld information. Additionally, it establishes the government's authority to order additional data for up to three years after contract acceptance and sets forth the requirements for subcontractors to ensure compliance with government rights. Overall, the document emphasizes the structured approach to managing data rights within government contracts, ensuring both parties understand their entitlements and responsibilities concerning intellectual property.
    The document outlines the Statement of Work (SOW) for procuring a Plasma Enhanced Chemical Vapor Deposition (PECVD) system for the Center for Nanoscale Materials at Argonne National Laboratory. The contractor is responsible for engineering, manufacturing, and assembling the system, followed by its testing to ensure compliance with technical specifications prior to shipment and installation. Key objectives include rapid and uniform film deposition for various materials, maintaining exceptional film uniformity, and fulfilling safety standards. The project emphasizes specific technical requirements, including a pressurized reactor design, dual frequency power generators for film stress control, and stringent deposition metrics for SiO2 and SiN films on silicon wafers. Delivery to Argonne National Laboratory is anticipated by November 2025, with final acceptance contingent upon specified performance criteria. Quality assurance processes include inspection and confirmation of order delivery without damage. This document highlights the government's initiative to advance research capabilities in nanoscale materials through precise procurement specifications, underscoring the importance of compliance and safety in federal contract processes.
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