Nanoscale dimensional metrology reference standards to support semiconductor metrology
ID: 7Type: BOTH
Overview

Topic

Nanoscale dimensional metrology reference standards to support semiconductor metrology

Agency

Department of CommerceNational Institute of Standards and Technology

Program

Type: SBIRPhase: BOTHYear: 2024
Timeline
  1. 1
    Release Apr 16, 2024 12:00 AM
  2. 2
    Open Apr 16, 2024 12:00 AM
  3. 3
    Next Submission Due Jun 14, 2024 12:00 AM
  4. 4
    Close Jun 14, 2024 12:00 AM
Description

The Department of Commerce, specifically the National Institute of Standards and Technology, is seeking proposals for the FY2024 Small Business Innovation Research (SBIR) Program for CHIPS for America – CHIPS Metrology. The solicitation, titled "Nanoscale dimensional metrology reference standards to support semiconductor metrology," focuses on the research topic of developing nanoscale dimensional metrology reference standards to support semiconductor metrology.

The technology or research being solicited aims to address the need for accurate and reliable measurement standards in the semiconductor industry. The development of nanoscale dimensional metrology reference standards will have significant applications in semiconductor manufacturing, ensuring the quality and performance of semiconductor devices.

The project duration for this solicitation is not specified, but the application due date is June 14, 2024. The funding specifics can be found on the grants.gov website.

Overall, this SBIR solicitation seeks proposals for the development of nanoscale dimensional metrology reference standards to support semiconductor metrology, with the potential to have a significant impact on the semiconductor industry.

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