FY2024 Small Business Innovation Research (SBIR) Program for CHIPS for America – CHIPS Metrology

Active
No
Status
Open
Release Date
April 16th, 2024
Open Date
April 16th, 2024
Due Date(s)
June 14th, 2024
Close Date
June 14th, 2024
Topic No.
6

Topic

High brightness compact X-ray or EUV sources for semiconductor metrology

Agency

Department of CommerceNational Institute of Standards and Technology

Program

Type: SBIRPhase: BOTHYear: 2024

Summary

The Department of Commerce, specifically the National Institute of Standards and Technology, is seeking proposals for the FY2024 Small Business Innovation Research (SBIR) Program for CHIPS for America – CHIPS Metrology. The solicitation is open and the deadline for applications is June 14, 2024. The specific topic of the solicitation is "High brightness compact X-ray or EUV sources for semiconductor metrology." The research aims to develop high brightness compact X-ray or extreme ultraviolet (EUV) sources for semiconductor metrology applications. The technology or research being solicited has potential applications in the semiconductor industry for metrology purposes. It can enable more accurate and efficient measurement of semiconductor devices, leading to improved manufacturing processes and higher quality products. The project duration and funding specifics are not provided in the document. For more information and to submit a proposal, interested parties can visit the SBIR topic link (https://www.sbir.gov/node/2609727) and the solicitation agency URL (https://grants.gov/search-results-detail/353574).

Description

Closed Topic Title