DIRECT TO PHASE II: Domestic Production of Zirconium and Hafnium Metal Organic Precursors

The Department of the Navy is seeking domestic manufacturing capabilities for critical chemical feedstocks, specifically tetrakis(dimethylamido)zirconium(IV) (TDMAZ) and tetrakis(dimethylamido)hafnium(IV) (TDMAH). This Direct to Phase II SBIR topic, DON26BZ01-DV002, aims to establish a pilot-scale manufacturing process for these high-purity metal dimethylamide compounds, targeting an annual production capacity exceeding 6,000 kg of TDMAZ at a retail price below $4,000/kg, preferably under $2,500/kg. These precursors are vital for atomic layer deposition, chemical vapor deposition, and chemical vapor infiltration in microelectronics and ceramic manufacturing. The manufacturing facility must be wholly US-owned and based in the US or its territories. Phase II requires demonstrating a scalable synthesis approach, providing 1 kg for Navy analysis, and achieving pilot-scale production of at least 50 kg TDMAZ/month. A technoeconomic analysis and the delivery of 100 kg of TDMAZ to the Government are also required. Phase III focuses on establishing full-scale production and supplying precursors to the DoD and commercial markets for aerospace, microelectronics, and nuclear applications.