Primary S-Parameter Standards for Plasma Etching Record

Amendment 0001 to Solicitation Number 1333ND26QNB030097, issued on March 11, 2026, addresses clarifications for the “DIN 7/16 Offset Shorts” requirement. This amendment provides government responses to two submitted questions. The first question sought clarification on Line Item 0002 regarding the specification for male DIN 7/16 connectors; the amendment confirms the wording should be “All devices shall have male DIN 7/16 connectors made to the IEEE 287.1-2021 metrology grade pin connector specification,” revising “be” to “have.” The second question addressed a typographical error in Scope, item 4, concerning the quantity of DIN offset shorts; the amendment confirms it should state “A quantity of seven (7) DIN 7/16 Offset Shorts,” correcting “1/16” to “7/16.” The response deadline remains March 16, 2026.

The National Institute of Standards and Technology (NIST) seeks primary S-parameter standards for plasma etching research to enhance semiconductor manufacturing metrology. This Statement of Work outlines the need for accurate high-power waveform measurements in semiconductor plasma processing, a capability currently lacking in the industry. The project will establish traceable S-parameter measurements using DIN 7/16 connector types, critical for high-power waveform metrology. The contractor must provide mechanical drawings, seven DIN 7/16 offset shorts of specified lengths and technical requirements (gold-plated, beadless, male connectors meeting IEEE 287.1-2021), and 28 dimensional measurements with uncertainties. Deliverables include initial and intermediate mechanical drawings, followed by the offset shorts and dimensional measurements, all with specific lead times and acceptance criteria. Payment will be a firm fixed price quotation, with no advanced payment, and partial shipments are not accepted. The equipment will be inspected and tested to ensure compliance with specifications.

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The National Institute of Standards and Technology (NIST) has issued Request for Quotation (RFQ) 1333ND26QNB030097 for commercial products and services, specifically for “Primary S-Parameter Standards for Plasma Etching Record.” The solicitation seeks firm fixed-price quotations for Mechanical Drawings of DIN 7/16 Offset Shorts and DIN 7/16 Offset Shorts. This acquisition is under full and open competition with NAICS code 334516. Quoters must have an active SAM.gov registration. Submissions are due by March 16, 2026, 4:00 PM ET, via email to ranae.armstrong@nist.gov and Donald.collie@nist.gov. Questions must be submitted by March 11, 2026. Quotations must include a Technical, Price, and Terms and Conditions volume, addressing technical capability, pricing, and acceptance of solicitation terms. Award will be based on the lowest priced, technically acceptable offer.