Suite of SmarAct Nanopositioners

The National Institute of Standards and Technology’s Applied Physics Division, Spin Electronics group is seeking a suite of SmarAct nanopositioners and hexapods for its EUV metrology and nanoscopic device characterization work, in a combined sources sought notice and notice of intent to sole source. The requirement covers multiple high-vacuum compatible piezo-controlled positioning systems, including a rotation stage, two 4-axis XYZR nanopositioners, two hexapod-like positioners, one optical tip/tilt mount, and the associated controllers, cables, and peripherals. The equipment must support operation in high vacuum, include non-magnetic components where needed for use in fields up to 1 Tesla, maintain compatibility with existing SmarAct systems, and meet encoder and repeatability requirements of at least 1 nm or 3 micro-degrees and better than 50 nm, respectively. NIST’s market research found that only SmarAct Inc. can meet the stated minimum requirements, and respondents are asked to provide detailed capability information, including product specifications, customization limits, and related services. Responses should be emailed to Junee Johnson as soon as possible and preferably before the closing date and time, and any firm considered for award must have an active SAM registration.