High-Vacuum Compatible Sample Positioning Stages

The National Institute of Standards and Technology (NIST) has issued a combined synopsis/solicitation, RFQ 1333ND26QNB030077, for a High Vacuum Positioning Stage. This Request for Quotation (RFQ) is a total small business set-aside under NAICS code 334516. The solicitation requests firm-fixed-price quotations for items including a large aperture high-vacuum compatible rotary stage, motion controller, vacuum feedthrough, and engineering services, with options for specific vacuum pressures. Quotes are due by June 5, 2026, at 12:00 PM ET. Offerors must be actively registered in SAM.gov and submit quotations in four volumes: Technical, Past Performance, Price, and Terms and Conditions. Technical capability, past performance, and price will be evaluated, with non-price factors being more important than price. Special consideration will be given to vendors providing documentation for vacuum procedures and achieving lower vacuum pressures. Prototypes, demonstration models, used, or refurbished instruments will not be accepted.

This government file outlines the applicable provisions and clauses for federal contracts, incorporating various regulations by reference and detailing specific clauses in full text. Key incorporated provisions address prohibitions on certain confidentiality agreements, System for Award Management (SAM) requirements, and restrictions on contracting with inverted domestic corporations. Full-text clauses cover terms and conditions for commercial products and services, including inspection, payment, disputes, termination, and warranties. It also details specific requirements for the place of manufacture, security prohibitions and exclusions related to telecommunications equipment and operations in Sudan and Iran, and procedures for disclosing non-compliance. Instructions for agency protests, GAO and Court of Federal Claims protests, and the place of acceptance for supplies and services are provided. The document also includes guidelines for contract performance during changes in NIST operating status and detailed electronic invoicing instructions via the Invoice Processing Platform (IPP).

NIST's NDCD requires a large aperture high-vacuum compatible rotary stage for its CHIPS project, aimed at developing advanced EUV diffractometry and spectroscopic ellipsometry for non-destructive measurement of nanoscale semiconductor features. This acquisition, critical for the American semiconductor industry, will enable precise computerized control of a rotation axis within a vacuum chamber, optimizing experimental conditions and reducing measurement uncertainties. The RFP outlines strict minimum requirements for the rotary stage, including high-vacuum compatibility (below 10^(-6) Torr), a clear aperture of 135-200mm, a -180° to 180° rotation range, and precise repeatability and accuracy. The system must also include a motion controller with Windows/LabView compatible software, a vacuum feedthrough, and engineering services for CAD drawing approval. Optional stricter vacuum compatibility (below 10^(-8) or 10^(-9) Torr) is also offered. Deliverables are expected within 18 weeks of approval, with F.O.B. Destination delivery to NIST Gaithersburg. The contractor must provide a one-year warranty, and payment is contingent upon installation, successful testing, and performance demonstration. Cybersecurity and privacy requirements, consistent with federal standards like FISMA and FIPS 200, are also mandated.