CHIPS Permittivity coupons and on-wafer calibration standards – Combined Sources Sought/Notice of Intent to Sole Source

The National Institute of Standards and Technology in the Department of Commerce is conducting a combined sources sought notice and notice of intent to sole source for permittivity coupons and on-wafer calibration standards to support traceable complex measurements and on-wafer calibration work. The scope includes high-purity fused silica wafers and fabrication services for standard reference materials, including wafers for wafer-level calibration kits, permittivity coupons at multiple thicknesses, and exploratory microstrip calibration kits, with optional coplanar waveguide kits and additional wafers and coupons. Key requirements include specific wafer sizes and thickness tolerances, laser cutting and healing etch, stealth dicing, glass wafer debonding, singulation, and, for the exploratory kits, provided layouts, backside metallization, consulting, process development, and related mask and etch steps in Boulder, Colorado. Responses should be emailed to the listed NIST contacts as soon as possible and preferably before the closing date and time, with questions submitted within 5 days of posting; if no alternate sources are identified, NIST intends to award sole source to Mosaic Microsystems LLC.