Notice of Intent to Noncompetitively Acquire Rapid Thermal Annealing (RTA) system
Contract Opportunity Analysis
The National Institute of Standards and Technology in Boulder, Colorado is planning a noncompetitive acquisition of a Rapid Thermal Annealing system for use in the Boulder Micro-Fabrication Facility. The system is intended to support film annealing and replace or augment the current tool with a similar configuration that can handle substrates up to 150 mm, include a vacuum chamber, fit within the existing 1 m x 1 m x 2 m space, and directly measure substrate temperature in situ with an optical pyrometer. NIST’s market research indicated that other vendors could not meet both the size constraints and the pyrometer requirement, so Annealsys appears to be the only source capable of satisfying the minimum needs. This is a special notice, not a solicitation, and no quotations will be requested; any source that believes it can meet the requirements may respond by the stated response date with its UEI, capability details, reseller authorization if applicable, and other supporting information, and the listed contact is Cielo Ibarra at cielo.ibarra@nist.gov.