Dry Pumps, Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent

NIST's Material Measurement Laboratory (MML) seeks two semiconductor-grade dry process pumps, specifically Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent, for its CHIPS R&D Metrology program. These pumps will be used in flow systems, including an ALD reactor, to acquire process data for developing digital twin technology in semiconductor manufacturing. The pumps must be compatible with organometallic and metal halide precursors and process gases. Key technical specifications include a multi-stage roots dry pump type, medium-duty corrosive semiconductor service, ultimate pressure of 9.75 mTorr or lower, minimum pumping speed of 30 CFM, and specific water cooling and inert purging requirements. They must also be chemically compatible with various reactive and corrosive vapors and feature corrosion-resistant internal construction. The contractor must deliver two new pumps within sixteen weeks of the order, with FOB Destination terms. Inspection and acceptance will involve performance tests and visual inspection, and a minimum one-year warranty is required.

This government file outlines the applicable provisions and clauses for a federal solicitation, incorporating various regulations by reference from the Federal Acquisition Regulation (FAR) and Commerce Acquisition Regulation (CAR). Key provisions include requirements related to confidentiality agreements, women-owned businesses, System for Award Management (SAM), prohibition on contracting with inverted domestic corporations, and representation regarding delinquent tax liability. Clauses cover whistleblower rights, SAM maintenance, incorporation of representations, protecting government interest with subcontractors, and various labor and trade regulations such as Convict Labor, Child Labor, Equal Opportunity, Combating Trafficking in Persons, and Buy American. The document also details specific provisions and clauses in full text, including the Buy American Certificate, which requires offerors to certify end product origins and domestic content. It also covers authorized deviations in provisions and clauses, inquiry procedures for offerors, and detailed instructions for filing agency, GAO, and Court of Federal Claims protests. Additionally, the file specifies the place of acceptance for supplies and services at the National Institute of Standards and Technology (NIST) in Gaithersburg, MD, provides guidance on contract performance during changes in NIST operating status, and outlines electronic billing instructions, including the use of the Invoice Processing Platform (IPP).

This document is a combined synopsis/solicitation (RFQ 1333ND26QNB030119) for the acquisition of two dry roughing pumps (Kashiyama MU100GP, Ebara ESR20N, or equivalent) for the U.S. Department of Commerce. It is a full and open competition under NAICS code 333242 with a small business size standard of 1,500 employees. Quoters must submit firm-fixed-price quotations by March 25, 2026, 4:00 PM ET, via email to both the Contract Specialist and Contracting Officer. All questions must be submitted by March 23, 2026. Submissions require active SAM.gov registration and must include a Technical, Price, and Terms and Conditions volume. Technical quotations must detail product specifications, country of origin, authorization to sell, and ability to meet delivery, installation, training, and warranty requirements. Price quotations must include the solicitation number, contact information, Unique Entity Identifier, firm-fixed prices for line items, and shipping costs. Award will be based on the lowest-priced, technically acceptable quotation, evaluated on technical capability and price reasonableness. The government reserves the right to award without clarifications.