AUTOMATED PUMPDOWN AND VENTING SYSTEM FOR VACUUM FILM DEPOSITION CHAMBER
ID: 468178Type: Combined Synopsis/Solicitation
Overview

Buyer

ENERGY, DEPARTMENT OFENERGY, DEPARTMENT OFBROOKHAVEN NATL LAB -DOE CONTRACTORUpton, NY, 11973, USA

NAICS

Air-Conditioning and Warm Air Heating Equipment and Commercial and Industrial Refrigeration Equipment Manufacturing (333415)

PSC

COMPRESSORS AND VACUUM PUMPS (4310)
Timeline
    Description

    The Department of Energy, through Brookhaven Science Associates, LLC, is soliciting quotes for an Automated Pumpdown and Venting System for a Vacuum Film Deposition Chamber, with a firm-fixed-price contract anticipated. The procurement requires a custom system capable of achieving specific performance metrics, including pumpdown from atmosphere to 10^-5 torr in 10 minutes and a minimum pumping capacity of 100,000 l/s for water, along with a minimum of five years of experience in water-vapor cryochiller system installation. This system is crucial for advanced vacuum processes in semiconductor manufacturing and related applications. Interested vendors must submit their quotes by November 14, 2025, at 4:00 PM EST, and can direct inquiries to Cassandra Smith at csmith2@bnl.gov.

    Point(s) of Contact
    Cassandra (Cassie) Smith
    (907) 888-3142
    csmith2@bnl.gov
    Files
    Title
    Posted
    This contract between Brookhaven Science Associates (BSA) and an unnamed contractor outlines the provision of an automated Pumpdown and Venting System for a Vacuum Film Deposition Chamber at Brookhaven National Laboratory. The scope of work, in accordance with the Statement of Work and Supplier Quality Assurance Requirements, details the need for a dual-circuit cryochiller, a high-capacity turbomolecular vacuum pump, an industrial-grade touchscreen interface with programmable automation, and safety interlocks. The contract specifies deliverables, payment terms, and shipping instructions, including crucial labeling and delivery protocols. It also delineates authorized representatives for both BSA and the contractor, emphasizing communication channels for technical and contractual matters. Additionally, the contract incorporates extensive general and special quality assurance requirements, covering aspects from supplier quality systems and subcontractor responsibilities to material protection, calibration, and handling of hazardous materials, ensuring compliance and safety throughout the project.
    Brookhaven National Laboratory, managed by Brookhaven Science Associates, LLC, has issued Request for Proposal No. 468178 for an Automated Pumpdown and Venting System for a Vacuum Film Deposition Chamber. This RFP outlines specific qualifiers for offerors, requiring a minimum of five years of documented experience in installing water-vapor cryochiller systems, including integration with Meissner traps and cryocoils, within semiconductor or vacuum process environments. Additionally, offerors must demonstrate the capability to design and implement remote control and monitoring systems for pumping operations, encompassing remote start/stop, setpoint adjustment, defrost functions, and fault/status monitoring via networked or serial communication interfaces. The pricing sheet requests the total price in USD and the place of manufacture, with prices remaining firm for 60 days. Delivery and payment terms are FOB Destination, Freight Prepaid (Domestic), DAP (International) Net 30 Days (Net 10 for Small Business). By signing, firms acknowledge and agree to BSA's requirements, terms, conditions, and delivery schedule, affirming their SAM registration and current small business size status.
    The Vendor ACH Authorization Form, managed by Brookhaven Science Associates, LLC under contract with the U.S. Department of Energy, is used to authorize electronic payments. Vendors provide their company name, vendor number, and tax ID. They also submit depository information, including the financial institution's name, routing number, and checking account number. By signing, the authorized representative authorizes Brookhaven National Laboratory/Brookhaven Science Associates to make ACH credit and correcting entries. This authorization remains valid until written notification of termination or modification is received, adhering to NACHA law. The form also collects the authorized representative's email, phone, and signature with the date.
    Brookhaven Science Associates, LLC (BSA), on behalf of the U.S. Department of Energy, has issued Combined Synopsis/Request for Quote (RFQ) Number 468178 for an Automated Pumpdown and Venting System for a Vacuum Film Deposition Chamber. This is an amendment to the original solicitation. The RFQ seeks a firm-fixed-price contract with quotes due by November 14, 2025, at 4:00 PM EST. Key requirements include a minimum of five years of experience in water-vapor cryochiller system installation and the capability to design remote control and monitoring systems. Offerors must submit a completed Quotation Pricing Sheet (Enclosure C) via email, be registered in the System for Award Management (SAM) or complete AMS-Form-050, and adhere to the Buy American Act. Anticipated delivery is 30 weeks ARO and acceptance testing at 40 weeks ARO. The award will be made to the lowest-priced, technically compliant, and responsible offeror.
    Brookhaven Science Associates (BSA) for the U.S. Department of Energy (DOE) is issuing Combined Synopsis/Request for Quote (RFQ) Number 468178 for an Automated Pumpdown and Venting System for a Vacuum Film Deposition Chamber. The RFQ, released in October 2025, seeks a firm fixed-price contract. Key dates include a questions due date of October 21, 2025, and a quote due date of October 31, 2025, both at 4:00 PM EST. Award will be based on the lowest total price from a responsive and responsible Offeror meeting all technical requirements and qualifiers, including five years of experience in water-vapor cryochiller system installation and capability in remote control and monitoring systems. Quotations must be submitted via email to Cassandra Smith (csmith2@bnl.gov) with the RFQ number in the subject line. Offerors must be registered in the System for Award Management (SAM) or complete AMS-Form-050. The requirement is subject to the Buy American Act, and Offerors must specify if proposed items are domestic end products.
    This document provides answers to questions regarding Request for Quote Number 468178 for an Automated Pumpdown and Venting System for a Vacuum Film Deposition Chamber. The deposition system is a custom unit, 58 inches in diameter and 50 inches in depth, with a removable door. The chamber volume is approximately 2.2 cubic meters. The system is made of steel, coated in glyptal. Key performance requirements include pumpdown from atmosphere to 10^-5 torr in 10 minutes, pumpdown from vacuum to atmosphere in under 15 minutes, and a minimum pumping capacity of 100,000 l/s for water. While the chamber has several 3-inch ports for a cold head, detailed system schematics and electrical drawings are unavailable.
    Lifecycle
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