Gas System
ID: N00173-25-Q-GF35Type: Combined Synopsis/Solicitation
Overview

Buyer

DEPT OF DEFENSEDEPT OF THE NAVYNAVAL RESEARCH LABORATORYWASHINGTON, DC, 20375-5328, USA

NAICS

Industrial Gas Manufacturing (325120)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)
Timeline
    Description

    The Department of Defense, through the Naval Research Laboratory (NRL), is seeking proposals for a comprehensive gas system, specifically a Metal Organic Chemical Vapor Deposition (MOCVD) system, to support semiconductor fabrication. The procurement includes a gas handling and abatement system that must meet stringent safety and operational requirements, including compliance with fire codes, extensive gas monitoring, and fail-safe mechanisms for hazardous materials. This system is critical for the growth of two-dimensional materials, ensuring high precision and safety in laboratory environments. Interested vendors must submit their proposals by November 21, 2025, and direct any questions to Graham W.J. Fisher at graham.w.fisher.civ@us.navy.mil before November 10, 2025.

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    The document outlines the requirements for a Metal Organic Chemical Vapor Deposition (MOCVD) system, focusing on a comprehensive gas handling and abatement system for growing two-dimensional materials. Key requirements include gas cabinets compliant with fire codes, system extraction for exhaust, ambient and specific gas monitoring points (H2, NH3, CH4, H2S, H2Se) with alarms, and a scrubber cabinet with hydride detection and a fail-safe shutdown mechanism. The system must incorporate fail-safe shutoff valves interlocked with facility safety, maintain high leak-tightness, and use specific plumbing materials like 316 SS tubing. Detailed gas flow rates for H2, CH4, H2S, H2Se, and NH3 are provided, along with specifications for gas lines and cylinder arrangements for various gases. A control system with extensive analog and digital inputs, light towers, E-stop buttons, and remote monitoring is required. The abatement system must include a clean scrubber with bypass capabilities, interlocked with the equipment’s safety system, and capable of monitoring hazardous materials at its outlet. Installation requirements cover site planning, piping, gas detection, connection to fire systems, pressure and helium-leak testing, and detailed reporting. The document also includes an overhead view of the proposed room layout with key equipment dimensions.
    The document outlines the technical specifications for a gas and detection system for the Naval Research Laboratory's B3 Room 230 MOCVD Laboratory. It details the requirements for various gas cabinets, including two-cylinder automatic gas cabinets for NH3 and nitrogen purge, and three-cylinder automatic gas cabinets for H2S/H2Se/nitrogen purge and H2/CH4/nitrogen purge. Also specified are ultra-high purity gas panels for Argon and Nitrogen. A comprehensive hazardous gas detection system is required, featuring 16 detectors, a central PLC with touchscreen, light trees, a remote display, and wired interfaces to tools, gas cabinets, and facility systems. The project mandates ultra-high purity 316L electro-polished piping and rigorous analytical testing, including four-hour pressure tests and helium leak tests to 1.0 x 10-8 atm-cc/sec, with optional purity testing for particles, moisture, and oxygen trace.
    The Naval Research Laboratory (NRL) outlines comprehensive requirements for on-site contractors, ensuring compliance with federal, state, and local regulations. Key areas include access protocols, such as COVID-19 vaccination certification and testing, badge and vehicle pass procedures, and adherence to NRL's hours of operation and holiday schedule. Contractors must manage hazardous materials, comply with occupational safety and health (OSHA) standards, and follow specific protocols for radiation, laser, and radiofrequency safety. Additionally, the document details requirements for handling ammunition, explosives, and biological research, emphasizing environmental management and training. The contractor is responsible for ensuring employee compliance with all NRL instructions, safety measures, and reporting requirements, with non-compliance potentially leading to denied access, contract termination, or financial penalties.
    This government file outlines the detailed requirements for a complex gas delivery and abatement system to support an AIXTRON 3x2 CCS MOCVD reactor, a high-precision tool for semiconductor fabrication. The specifications cover various gases like Nitrogen, H2, Ar, H2Se, H2S, CH3, and NH3, detailing line sizes, materials (primarily 316 SS welded tubing, electro-polished), pressure ratings, and filtration. Key safety features include continuous welded pipework for hazardous gases, extracted enclosures for connections, flame arrestors, overpressure protection, dual containment for highly toxic gases (PH3, AsH3), individual extraction for non-inert gas cabinets, and fail-safe shut-off valves. The system demands integration with facility alarm and safety systems, continuous monitoring for toxic and flammable gases in rooms and exhausts, and certified leak testing. The document also specifies different types of automatic and semi-automatic gas cabinets, a comprehensive gas leak and monitoring system with numerous analog and digital inputs, gas detectors, and a robust abatement system designed for annual canister service. The proposal must include shipping and a one-year warranty, alongside full installation, connection, and commissioning services.
    This combined synopsis/solicitation, N00173-25-Q-GF35, is a Request for Quotation (RFQ) issued by the Naval Research Laboratory (NRL) for gas cabinets and a monitoring system. The solicitation outlines general information, including a response date of October 15, 2025, NAICS code 325120, and a firm fixed-price contract type. Vendors must submit electronic quotes with product literature, company information, authorization letters (if applicable), warranty details, a software license summary, a foreign parts mitigation plan, and a compliance matrix. Offerors must be registered in SAM and agree to hold prices for 60 days. The evaluation will prioritize technical capability, past performance (assessed via SPRS), and price. New equipment only, no remanufactured items, and vendors must be authorized dealers or OEMs. Various FAR and DFARS clauses are incorporated by reference and in full text, including requirements for telecommunications equipment, supply chain risk, and ethical conduct.
    The Naval Research Laboratory (NRL) has issued Solicitation No. N00173-25-Q-GF35, a Request for Quotation (RFQ) for gas cabinets and a monitoring system. This combined synopsis/solicitation, prepared under FAR Subpart 12.6 and 13.5, outlines a Firm Fixed-Price (FFP) contract with NAICS Code 325120 and a size standard of 1200 employees. Quotes are due within 10 days of the September 12, 2025, post date, and questions must be submitted within seven days. The requirement includes a gas system and shipping, with a required delivery date of 24 weeks after award to the Naval Research Laboratory, Washington, DC. Vendors must submit electronic quotes with proposed products, pricing, literature, company information (UEI, CAGE code), Letter of Authorization if a reseller, commercial warranty, software license summary (if applicable), details on foreign parts mitigation, and a compliance matrix. Offerors must be registered in SAM and include FAR 52.212-3. Evaluation will prioritize Technical Capability (Superior, Acceptable, Unacceptable ratings), followed by Past Performance (SPRS risk analysis: Low, High, Neutral), and Price. The government anticipates awarding based on initial responses but may engage in limited exchanges. Various FAR and DFARS clauses are incorporated by reference and full text, covering areas like telecommunications equipment restrictions, national defense priority, protest procedures, and contractor representations.
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    Gas System
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    Combined Synopsis/Solicitation
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