Nanometer Scale Planar Films and Measurements
ID: NIST-FY25-CHIPS-0088Type: Sources Sought
Overview

Buyer

COMMERCE, DEPARTMENT OFNATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYDEPT OF COMMERCE NISTGAITHERSBURG, MD, 20899, USA

NAICS

Analytical Laboratory Instrument Manufacturing (334516)

PSC

LABORATORY EQUIPMENT AND SUPPLIES (6640)

Original Source

https://sam.gov/opp/87ff809f352342cdb9befd3ddc88227a/view
Timeline
    Description

    The Department of Commerce's National Institute of Standards and Technology (NIST) is seeking vendors to provide high-quality thin films on silicon wafers as part of its CHIPS Metrology program, which aims to enhance semiconductor manufacturing capabilities. The procurement specifically targets four classes of wafers: HfO2, TiN, ZrO2, and SiN, each with defined substrate and thickness parameters, along with customizable options for orders. These materials are crucial for advancing measurement techniques in semiconductor technology, and vendors are required to submit detailed responses that include company information, equipment specifications, and pricing transparency. Interested parties should direct inquiries to Elizabeth Timberlake at elizabeth.timberlake@nist.gov and submit their responses by the specified deadline, noting that this notice is a market research tool and not a commitment for contract awards.

    Point(s) of Contact
    Elizabeth Timberlake
    elizabeth.timberlake@nist.gov
    Files
    Title
    Posted
    Nanometer-scale planar films and measurement.docx
    NIST is soliciting vendors for high-quality thin films on silicon wafers to support its CHIPS Metrology program, aimed at advancing semiconductor manufacturing. The agency seeks suppliers for four specific classes of wafers: HfO2, TiN, ZrO2, and SiN, each with fixed parameters for substrates and thickness, along with customizable options at the time of order. Essential measurement data using non-destructive methods (e.g., XRR, XRF, XPS, SE) is required for quality assurance. Vendors must provide a detailed response, including company information, equipment specifications, performance capabilities, potential barriers to participation, customization options, and services offered with the equipment. The solicitation emphasizes the need for transparency in pricing, equipment origin, and existing federal contracts. Additionally, responding companies must indicate their business size classification and whether the requested equipment is available for purchase through existing contracts. The aim of this notice is to gauge the market's readiness to fulfill NIST's requirements and is not a commitment for contract awards, emphasizing that responses will not be considered proposals. NIST invites interested parties to clarify any aspects of the notice and submit their responses by a specified deadline.
    Lifecycle
    Title
    Type
    Nanometer Scale Planar Films and Measurements
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